The DOI matches its Crossref record; 6 of the 6 references it cites were found in a registry or an index.
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
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Citations
Cites
Critical Review: Adhesion in surface micromechanical structures
Maboudian, R., & Howe, R. T. (1997) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.589247 · Cited by 841
Self-citationStiction in surface micromachining
Tas, N., Sonnenberg, T., Jansen, H., Legtenberg, R., & Elwenspoek, M. (1996) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/6/4/005 · Cited by 542
Srinivasan, U., Houston, M. R., Howe, R. T., & Maboudian, R. (1998) · Journal of Microelectromechanical Systems · doi:10.1109/84.679393 · Cited by 422
Self-citationObservation of Three Growth Mechanisms in Self-Assembled Monolayers
Carraro, C., Yauw, O. W., Sung, M. M., & Maboudian, R. (1998) · The Journal of Physical Chemistry B · doi:10.1021/jp981019f · Cited by 163
Self-citationAdhesion and Friction Issues Associated With Reliable Operation of MEMS
Maboudian, R. (1998) · MRS Bulletin · doi:10.1557/s0883769400030633 · Cited by 72
Self-citationFactors enhancing the reliability of touch-mode electrostatic actuators
Cabuz, C., Cabuz, E., Ohnstein, T. R., Neus, J., & Maboudian, R. (2000) · Sensors and Actuators A Physical · doi:10.1016/s0924-4247(99)00281-2 · Cited by 64
Self-citation
Cited by
Surface tension-powered self-assembly of microstructures - The state-of-the-art
Syms, R. R. A., Yeatman, E. M., Bright, V. M., & Whitesides, G. M. (2003) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2003.811724 · Cited by 339
Fabrication of transparent superhydrophobic polytetrafluoroethylene coating
Alawajji, R. A., Kannarpady, G. K., & Biris, A. S. (2018) · Applied Surface Science · doi:10.1016/j.apsusc.2018.02.206 · Cited by 56
Li, J., Cao, W., Li, J., & Ma, M. (2021) · Journal of Colloid and Interface Science · doi:10.1016/j.jcis.2021.03.133 · Cited by 35
Metadata
- Authors
- Maboudian, R., Ashurst, W. R., & Carraro, C.
- Venue
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Published
- 2000-05
- Volume
- 82
- Issue
- 1-3
- Pages
- 219-223
- ISSN
- 0924-4247 (ISSN-L)
- OpenAlex
- W2102374119
- Cited by
- 379
- References
- 6
- FWCI
- 17.76
- Type
- journal article
- Language
- en
- Open access
- closed
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- The paper
- Maboudian, R., Ashurst, W. R., & Carraro, C. (2000). Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(99)00337-4
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
