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Critical Review: Adhesion in surface micromechanical structures
Abstract
We present a review on the state of knowledge of surface phenomena behind adhesion in surface micromechanical structures. After introducing the problem of release-related and in-use adhesion, a theoretical framework for understanding the various surface forces that cause strong adhesion of micromechanical structures is presented. Various approaches are described for reducing the work of adhesion. These include surface roughening and chemical modification of polycrystalline silicon surfaces. The constraints that fabrication processes such as release, drying, assembly, and packaging place on surface treatments are described in general. Finally, we briefly outline some of the important scientific and technological issues in adhesion and friction phenomena in micromechanical structures that remain to be clarified.
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Cited by
Ultrastrong adhesion of graphene membranes
Koenig, S. P., Boddeti, N. G., Dunn, M. L., & Bunch, J. S. (2011) · Nature Nanotechnology · doi:10.1038/nnano.2011.123 · Cited by 1,107
Evolution of the Adsorbed Water Layer Structure on Silicon Oxide at Room Temperature
Asay, D. B., & Kim, S. H. (2005) · The Journal of Physical Chemistry B · doi:10.1021/jp053042o · Cited by 732
Ali, M., Jha, N. K., Pal, N., Keshavarz, A., Hoteit, H., & Sarmadivaleh, M. (2022) · Earth-Science Reviews · doi:10.1016/j.earscirev.2021.103895 · Cited by 490
Metadata
- Authors
- Maboudian, R., & Howe, R. T.
- Venue
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Publisher
- American Vacuum Society
- Published
- 1997-01-01
- Volume
- 15
- Issue
- 1
- Pages
- 1-20
- ISSN
- 1071-1023 (ISSN-L)
- 1520-8567
- OpenAlex
- W1975216008
- Cited by
- 841
- References
- 0
- FWCI
- 38.58
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Critical Review: Adhesion in surface micromechanical structures. https://app.cochat.ai/papers/10.1116/1.589247
- The paper
- Maboudian, R., & Howe, R. T. (1997). Critical Review: Adhesion in surface micromechanical structures. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.589247
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
