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Gas flow in micro-channels
Abstract
An experimental and theoretical investigation of low Reynolds number, high subsonic Mach number, compressible gas flow in channels is presented. Nitrogen, helium, and argon gases were used. The channels were microfabricated on silicon wafers and were typically 100 μm wide, 10 4 μm long, and ranged in depth from 0.5 to 20 μm. The Knudsen number ranged from 10-3 to 0.4. The measured friction factor was in good agreement with theoretical predictions assuming isothermal, locally fully developed, first-order, slip flow.
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Citations
Cited by
MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS
Ho, C.-M., & Tai, Y.-C. (1998) · Annual Review of Fluid Mechanics · doi:10.1146/annurev.fluid.30.1.579 · Cited by 1,254
Evolution of Microchannel Flow Passages--Thermohydraulic Performance and Fabrication Technology
Kandlikar, S. G., & Grande, W. J. (2003) · Heat Transfer Engineering · doi:10.1080/01457630304040 · Cited by 960
A review on microchannel heat exchangers and potential applications
Khan, M. G., & Fartaj, A. (2011) · International Journal of Energy Research · doi:10.1002/er.1720 · Cited by 232
Metadata
- Authors
- Harley, J. C., Huang, Y., Bau, H. H., & Zemel, J. N.
- Venue
- Journal of Fluid Mechanics
- Publisher
- Cambridge University Press (CUP)
- Published
- 1995-02-10
- Volume
- 284
- Pages
- 257-274
- ISSN
- 0022-1120 (ISSN-L)
- 1469-7645
- OpenAlex
- W2086025153
- Cited by
- 493
- References
- 0
- FWCI
- 12.13
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Gas flow in micro-channels. https://app.cochat.ai/papers/10.1017/s0022112095000358
- The paper
- Harley, J. C., Huang, Y., Bau, H. H., & Zemel, J. N. (1995). Gas flow in micro-channels. Journal of Fluid Mechanics. https://doi.org/10.1017/s0022112095000358
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
