The DOI matches its Crossref record; 32 of the 32 references it cites were found in a registry or an index.
MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS
Abstract
▪ Abstract The micromachining technology that emerged in the late 1980s can provide micron-sized sensors and actuators. These micro transducers are able to be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical-systems (MEMS) that can perform real-time distributed control. This capability opens up a new territory for flow control research. On the other hand, surface effects dominate the fluid flowing through these miniature mechanical devices because of the large surface-to-volume ratio in micron-scale configurations. We need to reexamine the surface forces in the momentum equation. Owing to their smallness, gas flows experience large Knudsen numbers, and therefore boundary conditions need to be modified. Besides being an enabling technology, MEMS also provide many challenges for fundamental flow-science research.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Intermolecular and Surface Forces
(2011) · Intermolecular and Surface Forces · doi:10.1016/b978-0-12-391927-4.10024-6 · Cited by 16,923
On density effects and large structure in turbulent mixing layers
Brown, G. L., & Roshko, A. (1974) · Journal of Fluid Mechanics · doi:10.1017/s002211207400190x · Cited by 3,410
Silicon as a mechanical material
Petersen, K. E. (1982) · Proceedings of the IEEE · doi:10.1109/proc.1982.12331 · Cited by 2,902
Coherent Motions in the Turbulent Boundary Layer
Robinson, S. K. (1991) · Annual Review of Fluid Mechanics · doi:10.1146/annurev.fl.23.010191.003125 · Cited by 2,551
Zeta potential in colloid science. Principles and applications
Vold, M. J. (1982) · Journal of Colloid and Interface Science · doi:10.1016/0021-9797(82)90296-x · Cited by 2,330
Local and Global Instabilities in Spatially Developing Flows
Huerre, P., & Monkewitz, P. A. (1990) · Annual Review of Fluid Mechanics · doi:10.1146/annurev.fl.22.010190.002353 · Cited by 2,046
Present, R. D. (1958) · McGraw-Hill eBooks · Cited by 1,995
Silicon Processing for the VLSI Era
Wolf, S. M., & Tauber, R. N. (1986) · Medical Entomology and Zoology · Cited by 1,541
Die Gesetze der Molekularströmung und der inneren Reibungsströmung der Gase durch Röhren
Knudsen, M. (1909) · Annalen der Physik · doi:10.1002/andp.19093330106 · Cited by 1,246
Intermolecular and Surface Forces
(2011) · doi:10.1016/c2009-0-21560-1 · Cited by 871
Cited by
Electrochemistry of Nucleic Acids
Paleček, E., & Bartošík, M. (2012) · Chemical Reviews · doi:10.1021/cr200303p · Cited by 668
Closed-Loop Turbulence Control: Progress and Challenges
Brunton, S. L., & Noack, B. R. (2015) · Applied Mechanics Reviews · doi:10.1115/1.4031175 · Cited by 623
Industrial lab-on-a-chip: Design, applications and scale-up for drug discovery and delivery
Vladisavljević, G. T., Khalid, N., Neves, M. A., Kuroiwa, T., Nakajima, M., Uemura, K., Ichikawa, S., & Kobayashi, I. (2013) · Advanced Drug Delivery Reviews · doi:10.1016/j.addr.2013.07.017 · Cited by 313
The role of microchannel geometry selection on heat transfer enhancement in heat sinks: A review
Dash, B., Nanda, J., & Rout, S. K. (2022) · Heat Transfer · doi:10.1002/htj.22357 · Cited by 41
Metadata
- Authors
- Ho, C.-M., & Tai, Y.-C.
- Venue
- Annual Review of Fluid Mechanics
- Publisher
- Annual Reviews
- Published
- 1998-01
- Volume
- 30
- Issue
- 1
- Pages
- 579-612
- ISSN
- 0066-4189 (ISSN-L)
- 1545-4479
- OpenAlex
- W2106737203
- Cited by
- 1,254
- References
- 32
- FWCI
- 6.19
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS. https://app.cochat.ai/papers/10.1146/annurev.fluid.30.1.579
- The paper
- Ho, C.-M., & Tai, Y.-C. (1998). MICRO-ELECTRO-MECHANICAL-SYSTEMS (MEMS) AND FLUID FLOWS. Annual Review of Fluid Mechanics. https://doi.org/10.1146/annurev.fluid.30.1.579
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
