The DOI matches its Crossref record.
Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and Semiconductor Applications
Open accessAbstract
Electron tomography is a well-established technique for three-dimensional structure determination of (almost) amorphous specimens in life sciences applications. With the recent advances in nanotechnology and the semiconductor industry, there is also an increasing need for high-resolution three-dimensional (3D) structural information in physical sciences. In this article, we evaluate the capabilities and limitations of transmission electron microscopy (TEM) and high-angle-annular-dark-field scanning transmission electron microscopy (HAADF-STEM) tomography for the 3D structural characterization of partially crystalline to highly crystalline materials. Our analysis of catalysts, a hydrogen storage material, and different semiconductor devices shows that features with a diameter as small as 1–2 nm can be resolved in three dimensions by electron tomography. For partially crystalline materials with small single crystalline domains, bright-field TEM tomography provides reliable 3D structural information. HAADF-STEM tomography is more versatile and can also be used for high-resolution 3D imaging of highly crystalline materials such as semiconductor devices.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
3D imaging of nanomaterials by discrete tomography
Batenburg, K. J., Bals, S., Sijbers, J., Kübel, C., Midgley, P. A., Hernandez, J. C., Kaiser, U., Encina, E. R., Coronado, E. A., & Van Tendeloo, G. (2009) · Ultramicroscopy · doi:10.1016/j.ultramic.2009.01.009 · Cited by 277
Self-citationElectron Tomography for Heterogeneous Catalysts and Related Nanostructured Materials
Friedrich, H., de Jongh, P. E., Verkleij, A. J., & de Jong, K. P. (2009) · Chemical Reviews · doi:10.1021/cr800434t · Cited by 256
Metadata
- Authors
- Kübel, C., Voigt, A., Schoenmakers, R., Otten, M., Su, D., Lee, T.-C., Carlsson, A., & Bradley, J.
- Venue
- Microscopy and Microanalysis
- Publisher
- Oxford University Press (OUP)
- Published
- 2005-09-26
- Volume
- 11
- Issue
- 5
- Pages
- 378-400
- ISSN
- 1431-9276 (ISSN-L)
- 1435-8115
- OpenAlex
- W2028347506
- Cited by
- 255
- References
- 0
- FWCI
- 11.12
- Type
- journal article
- Language
- en
- Open access
- green
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and Semiconductor Applications. https://app.cochat.ai/papers/10.1017/s1431927605050361
- The paper
- Kübel, C., Voigt, A., Schoenmakers, R., Otten, M., Su, D., Lee, T.-C., Carlsson, A., & Bradley, J. (2005). Recent Advances in Electron Tomography: TEM and HAADF-STEM Tomography for Materials Science and Semiconductor Applications. Microscopy and Microanalysis. https://doi.org/10.1017/s1431927605050361
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
