The DOI matches its Crossref record; 276 of the 276 references it cites were found in a registry or an index.
Recent Advances in Tunable Metasurfaces: Materials, Design, and Applications
Open accessAbstract
Metasurfaces, a two-dimensional (2D) form of metamaterials constituted by planar meta-atoms, exhibit exotic abilities to tailor electromagnetic (EM) waves freely. Over the past decade, tremendous efforts have been made to develop various active materials and incorporate them into functional devices for practical applications, pushing the research of tunable metasurfaces to the forefront of nanophotonics. Those active materials include phase change materials (PCMs), semiconductors, transparent conducting oxides (TCOs), ferroelectrics, liquid crystals (LCs), atomically thin material, etc., and enable intriguing performances such as fast switching speed, large modulation depth, ultracompactness, and significant contrast of optical properties under external stimuli. Integration of such materials offers substantial tunability to the conventional passive nanophotonic platforms. Tunable metasurfaces with multifunctionalities triggered by various external stimuli bring in rich degrees of freedom in terms of material choices and device designs to dynamically manipulate and control EM waves on demand. This field has recently flourished with the burgeoning development of physics and design methodologies, particularly those assisted by the emerging machine learning (ML) algorithms. This review outlines recent advances in tunable metasurfaces in terms of the active materials and tuning mechanisms, design methodologies, and practical applications. We conclude this review paper by providing future perspectives in this vibrant and fast-growing research field.
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Items 201–276 of 276
Tunable plasmonic bound states in the continuum in the visible range
Sun, S., Ding, Y., Li, H., Hu, P., Cheng, C., Sang, Y., Cao, F., Hu, Y. M., Alù, A., Liu, D., et al. (2021) · Physical review. B./Physical review. B · doi:10.1103/physrevb.103.045416 · Cited by 86
Self-citationLiu, C., Liu, P., Yang, C., Lin, Y., & Liu, H. (2018) · Carbon · doi:10.1016/j.carbon.2018.10.061 · Cited by 85
Self-citationUltrafast all-optical terahertz modulation based on an inverse-designed metasurface
He, W., Tong, M., Xu, Z., Hu, Y., Cheng, X., & Jiang, T. (2021) · Photonics Research · doi:10.1364/prj.423119 · Cited by 82
Reconfigurable Ultraviolet and High-Energy Visible Dielectric Metamaterials
Gholipour, B., Piccinotti, D., Karvounis, A., MacDonald, K. F., & Zheludev, N. I. (2019) · Nano Letters · doi:10.1021/acs.nanolett.8b04576 · Cited by 80
Metasurface-Dressed Two-Dimensional on-Chip Waveguide for Free-Space Light Field Manipulation
Ding, Y., Chen, X., Duan, Y., Huang, H., Zhang, L., Chang, S., Guo, X., & Ni, X. (2022) · ACS Photonics · doi:10.1021/acsphotonics.1c01577 · Cited by 78
Resonance continuum coupling in high-permittivity dielectric metamaterials
Lepetit, T., Akmansoy, É., Ganne, J., & Lourtioz, J. (2010) · Physical Review B · doi:10.1103/physrevb.82.195307 · Cited by 75
Ultraviolet Interband Plasmonics With Si Nanostructures
Dong, Z., Wang, T., Chi, X., Ho, J., Tserkezis, C., Yap, S. L. K., Rusydi, A., Tjiptoharsono, F., Thian, D., Mortensen, N. A., et al. (2019) · Nano Letters · doi:10.1021/acs.nanolett.9b03243 · Cited by 75
Self-citationSpace and Time Modulations of Light with Metasurfaces: Recent Progress and Future Prospects
Mikheeva, E., Kyrou, C., Bentata, F., Khadir, S., Cueff, S., & Genevet, P. (2022) · ACS Photonics · doi:10.1021/acsphotonics.1c01833 · Cited by 75
Shi, Y., & Fan, S. (2016) · Applied Physics Letters · doi:10.1063/1.4939915 · Cited by 74
Vasić, B., Isić, G., Beccherelli, R., & Zografopoulos, D. C. (2019) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2019.2956856 · Cited by 72
Sun, M., Jia, X., Sun, X. W., Liang, X., Valuckas, V., Zheng, Y., Paniagua-Domínguez, R. J., & Kuznetsov, A. I. (2019) · Scientific Reports · doi:10.1038/s41598-019-45091-5 · Cited by 71
All‐Dielectric Metasurface‐Enabled Multiple Vortex Emissions
Zhang, H., Sha, X., Chen, Q., Cheng, J., Ji, Z., Song, Q., Yu, S., & Xiao, S. (2022) · Advanced Materials · doi:10.1002/adma.202109255 · Cited by 70
Complex Inverse Design of Meta-optics by Segmented Hierarchical Evolutionary Algorithm
Jin, Z., Mei, S., Chen, S., Li, Y., Zhang, C., He, Y., Yu, X., Yu, C., Yang, J. K. W., Luk’yanchuk, B., et al. (2019) · ACS Nano · doi:10.1021/acsnano.8b08333 · Cited by 64
Code Division Multiplexing Inspired Dynamic Metasurface Holography
Li, X., Zhao, R., Wei, Q., Geng, G., Li, J., Zhang, S., Huang, L., & Wang, Y. (2021) · Advanced Functional Materials · doi:10.1002/adfm.202103326 · Cited by 63
Liu, W., Zou, Q., Zheng, C., & Jin, C. (2018) · ACS Nano · doi:10.1021/acsnano.8b06623 · Cited by 62
Hu, Y., Tong, M., Cheng, X., Zhang, J., Hao, H., You, J., Zheng, X., & Jiang, T. (2021) · ACS Photonics · doi:10.1021/acsphotonics.0c01194 · Cited by 62
Fast amplitude modulation up to 1.5 GHz of mid-IR free-space beams at room-temperature
Pirotta, S., Tran, N.-L., Jollivet, A., Biasiol, G., Crozat, P., Manceau, J., Bousseksou, A., & Colombelli, R. (2021) · Nature Communications · doi:10.1038/s41467-020-20710-2 · Cited by 61
Dynamic Optical Tuning of Interlayer Interactions in the Transition Metal Dichalcogenides
Mannebach, E., Nyby, C. M., Ernst, F., Zhou, Y., Tolsma, J. R., Li, Y., Sher, M., Tung, I., Zhou, H., Zhang, Q., et al. (2017) · Nano Letters · doi:10.1021/acs.nanolett.7b03955 · Cited by 59
Tunable metasurfaces for visible and SWIR applications
Lee, C., Choi, H. J., & Jeong, H. (2020) · Nano Convergence · doi:10.1186/s40580-019-0213-2 · Cited by 58
Inverse design of broadband highly reflective metasurfaces using neural networks
Harper, E. S., Coyle, E. J., Vernon, J. P., & Mills, M. S. (2020) · Physical review. B./Physical review. B · doi:10.1103/physrevb.101.195104 · Cited by 58
Electro‐Optic Metasurfaces Based on Barium Titanate Nanoparticle Films
Karvounis, A., Vogler‐Neuling, V. V., Richter, F., Dénervaud, E., Timofeeva, M., & Grange, R. (2020) · Advanced Optical Materials · doi:10.1002/adom.202000623 · Cited by 58
Simultaneous Achromatic and Varifocal Imaging with Quartic Metasurfaces in the Visible
Colburn, S., & Majumdar, A. (2019) · ACS Photonics · doi:10.1021/acsphotonics.9b01216 · Cited by 57
All‐Optical and Ultrafast Tuning of Terahertz Plasmonic Metasurfaces
Cai, H., Huang, Q., Hu, X. F., Liu, Y., Fu, Z., Zhao, Y. H., He, H., & Lu, Y. (2018) · Advanced Optical Materials · doi:10.1002/adom.201800143 · Cited by 56
Electrically Tunable Multicolored Filter Using Birefringent Plasmonic Resonators and Liquid Crystals
Driencourt, L., Federspiel, F., Kazazis, D., Tseng, L., Frantz, R., Ekinci, Y., Ferrini, R., & Gallinet, B. (2019) · ACS Photonics · doi:10.1021/acsphotonics.9b01404 · Cited by 56
Jain, A., Moitra, P., Koschny, T., Valentine, J., & Soukoulis, C. M. (2015) · Advanced Optical Materials · doi:10.1002/adom.201500222 · Cited by 53
Real-Time Tunable Strong Coupling: From Individual Nanocavities to Metasurfaces
Huang, J., Traverso, A. J., Yang, G., & Mikkelsen, M. H. (2019) · ACS Photonics · doi:10.1021/acsphotonics.8b01743 · Cited by 53
The road to atomically thin metasurface optics
Brongersma, M. L. (2020) · Nanophotonics · doi:10.1515/nanoph-2020-0444 · Cited by 53
Peng, C., Hamerly, R., Soltani, M., & Englund, D. R. (2019) · Optics Express · doi:10.1364/oe.27.030669 · Cited by 51
Multistate Tuning of Third Harmonic Generation in Fano‐Resonant Hybrid Dielectric Metasurfaces
Abdelraouf, O. A. M., Anthur, A. P., Dong, Z., Liu, H., Wang, Q., Krivitsky, L. A., Wang, X. R., Wang, Q. J., & Liu, H. (2021) · Advanced Functional Materials · doi:10.1002/adfm.202104627 · Cited by 51
Self-citationFull 2π tunable phase modulation using avoided crossing of resonances
Kim, J. Y., Park, J., Holdman, G. R., Heiden, J. T., Kim, S., Brar, V. W., & Jang, M. S. (2022) · Nature Communications · doi:10.1038/s41467-022-29721-7 · Cited by 50
Silicon Nanoantenna Mix Arrays for a Trifecta of Quantum Emitter Enhancements
Dong, Z., Gorelik, S., Paniagua-Dominguez, R., Yik, J., Ho, J., Tjiptoharsono, F., Lassalle, E., Rezaei, S. D., Neo, D. C. J., Bai, P., et al. (2021) · Nano Letters · doi:10.1021/acs.nanolett.1c01570 · Cited by 47
Self-citationThermally tunable metamaterial absorber based on strontium titanate in the terahertz regime
Huang, X., He, W., Yang, F., Ran, J., Yang, Q., & Xie, S. (2019) · Optical Materials Express · doi:10.1364/ome.9.001377 · Cited by 46
Near‐Infrared Reflection Modulation Through Electrical Tuning of Hybrid Graphene Metasurfaces
Cai, Z., & Liu, Y. (2022) · Advanced Optical Materials · doi:10.1002/adom.202102135 · Cited by 46
Gate-Tunable Emission of Exciton–Plasmon Polaritons in Hybrid MoS2-Gap-Mode Metasurfaces
Ni, P., Bugallo, A. D. L., Arreola, V. M. A., Salazar, M. F., Strupiechonski, E. C., Brändli, V., Sawant, R., Alloing, B., & Genevet, P. (2019) · ACS Photonics · doi:10.1021/acsphotonics.9b00433 · Cited by 45
Applicability of multipole decomposition to plasmonic- and dielectric-lattice resonances
Han, A., Moloney, J. V., & Babicheva, V. E. (2022) · The Journal of Chemical Physics · doi:10.1063/5.0082005 · Cited by 43
Dynamically configurable hybridization of plasmon modes in nanoring dimer arrays
Zhang, L., Dong, Z., Wang, Y. M., Liu, Y., Zhang, S., Yang, J. K. W., & Qiu, C. (2015) · Nanoscale · doi:10.1039/c5nr03094c · Cited by 42
Self-citationReconfigurable Surface Plasmon Resonance Photodetector with a MEMS Deformable Cantilever
Oshita, M., Takahashi, H., Ajiki, Y., & Kan, T. (2020) · ACS Photonics · doi:10.1021/acsphotonics.9b01510 · Cited by 42
Boschini, F., Minola, M., Sutarto, R., Schierle, E., Bluschke, M., Das, S., Yang, Y., Michiardi, M., Shao, Y., Feng, X., et al. (2021) · Nature Communications · doi:10.1038/s41467-020-20824-7 · Cited by 41
Time-Varying Metasurfaces Based on Graphene Microribbon Arrays
Liu, Z., Li, Z., & Aydın, K. (2016) · ACS Photonics · doi:10.1021/acsphotonics.6b00653 · Cited by 39
Reconfiguring structured light beams using nonlinear metasurfaces
Xu, Y., Sun, J., Frantz, J. A., Shalaev, M. I., Walasik, W. T., Pandey, A., Myers, J. D., Bekele, R. Y., Tsukernik, A., Sanghera, J. S., et al. (2018) · Optics Express · doi:10.1364/oe.26.030930 · Cited by 38
Hu, Y., Tong, M., Xu, Z., Cheng, X., & Jiang, T. (2021) · Small · doi:10.1002/smll.202006489 · Cited by 38
Single-Layer Metasurfaces as Spectrally Tunable Terahertz Half- and Quarter-Waveplates
Lee, S., Kim, W. T., Kang, J.-H., Kang, B. J., Rotermund, F., & Park, Q. (2019) · ACS Applied Materials & Interfaces · doi:10.1021/acsami.8b21456 · Cited by 36
Perfectly-reflecting guided-mode-resonant photonic lattices possessing Mie modal memory
Ko, Y. H., Razmjooei, N., Hemmati, H., & Magnusson, R. (2021) · Optics Express · doi:10.1364/oe.434359 · Cited by 36
Reconfiguring Magnetic Infrared Resonances with the Plasmonic Phase-Change Material In3SbTe2
Heßler, A., Conrads, L., Wirth, K. G., Wuttig, M., & Taubner, T. (2022) · ACS Photonics · doi:10.1021/acsphotonics.2c00432 · Cited by 36
III–V Heterojunction Platform for Electrically Reconfigurable Dielectric Metasurfaces
Iyer, P. P., Pendharkar, M., Palmstrøm, C. J., et al. (2019) · ACS Photonics · doi:10.1021/acsphotonics.9b00178 · Cited by 35
Multifunctional Metasurface: Coplanar Embedded Design for Metalens and Nanoprinted Display
Chen, R., Zhou, Y., Chen, W., Chen, R., Iqbal, N., & Ma, Y. (2020) · ACS Photonics · doi:10.1021/acsphotonics.9b01795 · Cited by 34
Li, Y., Pang, Y., Wang, J., Zheng, Q., Zhang, J., Zhang, J., Jing, Y., Zheng, L., Feng, M., Wang, H., et al. (2021) · Advanced Optical Materials · doi:10.1002/adom.202101982 · Cited by 34
Mechanically tunable focusing metamirror in the visible
Cheng, F., Qiu, L., Nikolov, D. K., Bauer, A. M., Rolland, J. P., & Vamivakas, A. N. (2019) · Optics Express · doi:10.1364/oe.27.015194 · Cited by 33
Zhang, X., Fan, F., Zhang, C., Ji, Y., Wang, X., & Chang, S. (2019) · Optical Materials Express · doi:10.1364/ome.383058 · Cited by 33
Self-citationSuperperiodic Liquid-Crystal Metasurfaces for Electrically Controlled Anomalous Refraction
Gorkunov, M. V., Kasyanova, I. V., Artemov, V. V., Ezhov, A. A., Mamonova, A. V., Simdyankin, I. V., & Palto, S. P. (2020) · ACS Photonics · doi:10.1021/acsphotonics.0c01168 · Cited by 33
Shameli, M. A., Fallah, A., & Yousefi, L. (2021) · Journal of the Optical Society of America B · doi:10.1364/josab.432989 · Cited by 32
Liu, W., Wang, Y., Zheng, B., Hwang, M., Ji, Z., Liu, G., Li, Z., Sorger, V. J., Pan, A., & Agarwal, R. (2019) · Nano Letters · doi:10.1021/acs.nanolett.9b05056 · Cited by 31
Li, H., Zhou, C., Lee, W., Choi, D., & Lee, S. (2021) · Nanophotonics · doi:10.1515/nanoph-2021-0609 · Cited by 30
Flexible Plasmonic Tapes with Nanohole and Nanoparticle Arrays for Refractometric and Strain Sensing
Jia, P., Kong, D., & Ebendorff‐Heidepriem, H. (2020) · ACS Applied Nano Materials · doi:10.1021/acsanm.0c01673 · Cited by 29
Liquid Crystal Enabled Dynamic Nanodevices
Ma, Z., Meng, X., Liu, X., Si, G., & Liu, Y. (2018) · Nanomaterials · doi:10.3390/nano8110871 · Cited by 28
Bolometric photodetection using plasmon-assisted resistivity change in vanadium dioxide
Takeya, H., Frame, J., Tanaka, T., Urade, Y., Xu, F., & Kubo, W. (2018) · Scientific Reports · doi:10.1038/s41598-018-30944-2 · Cited by 27
Polarization states synthesizer based on a thermo-optic dielectric metasurface
Bosch, M., Shcherbakov, M. R., Fan, Z., & Shvets, G. B. (2019) · Journal of Applied Physics · doi:10.1063/1.5094158 · Cited by 27
Plasmonics of Au/Polymer Core/Shell Nanocomposites for Thermoresponsive Hybrid Metasurfaces
Magnozzi, M., Brasse, Y., König, T. A. F., Bisio, F., Bittrich, E., Fery, A., & Canepa, M. (2020) · ACS Applied Nano Materials · doi:10.1021/acsanm.9b02403 · Cited by 27
Artificial neural network discovery of a switchable metasurface reflector
Thompson, J. R., Burrow, J. A., Shah, P., Slagle, J. E., Harper, E. S., Rynbach, A. J. V., Agha, I. H., & Mills, M. S. (2020) · Optics Express · doi:10.1364/oe.400360 · Cited by 26
Ultrafast all-optical diffraction switching using semiconductor metasurfaces
Vabishchevich, P. P., Vaskin, A., Karl, N. J., Reno, J. L., Sinclair, M. B., Staude, I., & Brener, I. (2021) · Applied Physics Letters · doi:10.1063/5.0049585 · Cited by 23
Design and fabrication of a single metal layer tunable metamaterial absorber in THz range
Zhong, M., Jiang, X., Zhu, X., Zhang, J., & Zhong, J. (2020) · Optics & Laser Technology · doi:10.1016/j.optlastec.2019.106023 · Cited by 22
Kumagai, H., Fujie, T., Sawada, K., & Takahashi, K. (2020) · Advanced Optical Materials · doi:10.1002/adom.201902074 · Cited by 22
Lenaerts, J., Pinson, H., & Ginis, V. (2020) · Nanophotonics · doi:10.1515/nanoph-2020-0379 · Cited by 22
Engineering tunability through electro-optic effects to manifest a multifunctional metadevice
Naeem, T., Khaliq, H. S., Zubair, M. F., Tauqeer, T., & Mehmood, M. Q. (2021) · RSC Advances · doi:10.1039/d1ra00901j · Cited by 21
Dynamic circular birefringence response with fractured geometric phase metasurface systems
Wang, E. W., Phan, T., Yu, S., Dhuey, S. D., & Fan, J. A. (2022) · Proceedings of the National Academy of Sciences · doi:10.1073/pnas.2122085119 · Cited by 21
Zhou, C., Xie, Z., Zhang, B., Lei, T., Li, Z., Du, L., & Yuan, X. (2020) · Optics Express · doi:10.1364/oe.412787 · Cited by 20
Analyzing the polarization response of a chiral metasurface stack by semi-analytic modeling
Sperrhake, J., Decker, M., Falkner, M., Fasold, S., Kaiser, T., Staude, I., & Pertsch, T. (2019) · Optics Express · doi:10.1364/oe.27.001236 · Cited by 19
Tunable beam deflector by mutual motion of cascaded bilayer metasurfaces
Du, Z., Hu, B., Liu, W.-G., Liu, J., & Wang, Y. (2019) · Journal of Optics · doi:10.1088/2040-8986/ab3e7a · Cited by 19
Lu, H., Xiong, H., Huang, Z., Li, Y., Dong, H., He, D., Dong, J., Guan, H., Qiu, W., Zhang, X., et al. (2019) · Optics Express · doi:10.1364/oe.27.019852 · Cited by 17
Chen, C., & Li, S. (2018) · ACS Photonics · doi:10.1021/acsphotonics.8b00122 · Cited by 14
Gate‐tunable metafilm absorber based on indium silicon oxide
Zhao, H., Zhang, R., Chorsi, H. T., Britton, W. A., Chen, Y., Iyer, P. P., Schuller, J. A., Negro, L. D., & Klamkin, J. (2018) · Nanophotonics · doi:10.1515/nanoph-2019-0190 · Cited by 13
Genetic algorithm optimization of high order surface etched grating tunable laser array
Wallace, M. J., Naimi, S. T., Jain, G., McKenna, R., Bello, F., & Donegan, J. F. (2020) · Optics Express · doi:10.1364/oe.383914 · Cited by 13
Stretchable Substrates for the Assembly of Polymeric Microstructures
Vinod, T. P., Taylor, J. M., Konda, A., & Morin, S. A. (2016) · Small · doi:10.1002/smll.201603350 · Cited by 12
Kim, J., & Escuti, M. J. (2019) · Journal of the Optical Society of America B · doi:10.1364/josab.36.000d42 · Cited by 11
Optical magnetic lens: towards actively tunable terahertz optics
Shamuilov, G., Domina, K., Khardikov, V. V., et al. (2020) · Nanoscale · doi:10.1039/d0nr06198k · Cited by 7
Electrically adjusted infrared transmittance of a functioned silicon via an au nano‐cone metasurface
Wei, D. M., Hu, C., Chen, M., Shi, J., Luo, J., Wang, H., Xie, C., & Zhang, X. (2020) · Nano Select · doi:10.1002/nano.202000156 · Cited by 2
Metadata
- Authors
- Abdelraouf, O. A. M., Wang, Z., Liu, H., Dong, Z., Wang, Q., Ye, M., Wang, X. R., Wang, Q. J., & Liu, H.
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2022-08-17
- Volume
- 16
- Issue
- 9
- Pages
- 13339-13369
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W4221160224
- Cited by
- 265
- References
- 276
- FWCI
- 11.09
- Type
- journal article
- Language
- en
- Open access
- green
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