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Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors
Abstract
Atomic layer deposition (ALD) of smooth and highly conformal films of hafnium and zirconium oxides was studied using six metal alkylamide precursors for hafnium and zirconium. Water was used as an oxygen source during these experiments. As deposited, these films exhibited a smooth surface with a measured roughness equivalent to that of the substrate on which they were deposited. These films also exhibited a very high degree of conformality: 100% step coverage on holes with aspect ratios greater than 35. The films were completely uniform in thickness and composition over the length of the deposition reactor. The films were free of detectable impurities and had the expected (2:1) oxygen-to-metal ratio. Films were deposited at substrate temperatures from 50 to 500 °C from precursors that were vaporized at temperatures from 40 to 140 °C. The precursors were found to be highly reactive with hydroxylated surfaces. Their vapor pressures were measured over a wide temperature range. Deposition reactor design and ALD cycle design using these precursors are discussed.
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Citations
Cited by
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Javey, A., Guo, J., Farmer, D. B., Wang, Q., Wang, D., Gordon, R. G., Lundstrom, M., & Dai, H. (2004) · Nano Letters · doi:10.1021/nl035185x · Cited by 537
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Cremers, V., Puurunen, R. L., & Dendooven, J. (2019) · Applied Physics Reviews · doi:10.1063/1.5060967 · Cited by 508
Ritala, M., & Leskelä, M. (2002) · Handbook of Thin Films · doi:10.1016/b978-012512908-4/50005-9 · Cited by 451
Seok, J. Y., Song, S. J., Yoon, J. H., Yoon, K. J., Park, T. H., Kwon, D. E., Lim, H., Kim, G. H., Jeong, D. S., & Hwang, C. S. (2014) · Advanced Functional Materials · doi:10.1002/adfm.201303520 · Cited by 383
Metadata
- Authors
- Hausmann, D. M., Kim, E., Becker, J., & Gordon, R. G.
- Venue
- Chemistry of Materials
- Publisher
- American Chemical Society (ACS)
- Published
- 2002-09-21
- Volume
- 14
- Issue
- 10
- Pages
- 4350-4358
- ISSN
- 0897-4756 (ISSN-L)
- 1520-5002
- OpenAlex
- W2041246757
- Cited by
- 542
- References
- 0
- FWCI
- 18.93
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors. https://app.cochat.ai/papers/10.1021/cm020357x
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- Hausmann, D. M., Kim, E., Becker, J., & Gordon, R. G. (2002). Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors. Chemistry of Materials. https://doi.org/10.1021/cm020357x
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
