The DOI matches its Crossref record.
Molecular Layer Deposition of Nylon 66 Films Examined Using in Situ FTIR Spectroscopy
Abstract
Molecular layer deposition (MLD) techniques can utilize sequential, self-limiting surface reactions with bifunctional monomers to grow polymer films. In this study, transmission in situ Fourier transform infrared (FTIR) investigations were utilized to monitor the growth of nylon 66 MLD films using adipoyl chloride (AC) and 1,6-hexanediamine (HD) as the bifunctional monomers. In situ FTIR measurements on high surface area SiO 2 powders monitored the linear growth of the integrated absorbance of the N−H, C−H, C−N, and C O stretching vibrations and the CO−N−H bending vibrations versus the number AC and HD sequential exposures. The growth of the integrated absorbance for the nylon 66 features was also self-limiting as a function of the individual AC and HD exposures. In addition to the vibrational modes expected for nylon 66, vibrational features were also observed that were consistent with some ammonium chloride salt incorporated in the film during nylon 66 MLD. The temperature dependence of the nylon 66 growth rate for constant exposures revealed that the highest growth rates were observed at the lowest sample temperature of 62 °C. This temperature dependence was consistent with a precursor-mediated adsorption model. Nylon 66 MLD was studied with and without surface functionalization of the SiO 2 substrate using (3-aminopropyl)triethoxysilane (APS). The APS functionalization facilitated the reaction of AC with the amine-terminated surface. The growth rate of the nylon 66 MLD films was estimated using in situ transmission FTIR measurements on flat KBr substrates with an amine-terminated Al 2 O 3 ALD overlayer. The integrated absorbance of the C−H vibrational stretches was utilized to estimate the nylon 66 MLD growth rate per AC/HD reaction cycle. The observed growth rates were both above and below the expected growth rate for one nylon 66 bilayer. This range of growth rates illustrates the difficulties involved in using bifunctional monomers for MLD.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Surface Chemistry for Molecular Layer Deposition of Organic and Hybrid Organic−Inorganic Polymers
George, S. M., Yoon, B., & Dameron, A. A. (2009) · Accounts of Chemical Research · doi:10.1021/ar800105q · Cited by 377
Self-citationJung, Y. S., Cavanagh, A. S., Dillon, A. C., Groner, M. D., George, S. M., & Lee, S.-H. (2010) · Journal of The Electrochemical Society · doi:10.1149/1.3258274 · Cited by 361
Self-citationMolecular Layer Deposition of Alucone Polymer Films Using Trimethylaluminum and Ethylene Glycol
Dameron, A. A., Seghete, D., Burton, B. B., Davidson, S. D., Cavanagh, A. S., Bertrand, J. A., & George, S. M. (2008) · Chemistry of Materials · doi:10.1021/cm7032977 · Cited by 342
Self-citationSun, Y., Zhao, Y., Wang, J., Liang, J., Wang, C., Sun, Q., Lin, X., Adair, K. R., Luo, J., Wang, D., et al. (2019) · Advanced Materials · doi:10.1002/adma.201806541 · Cited by 287
Al Zoubi, W., Kamil, M. P., Fatimah, S., Nashrah, N., & Ko, Y. G. (2020) · Progress in Materials Science · doi:10.1016/j.pmatsci.2020.100663 · Cited by 265
Liu, J., Yoon, B., Kuhlmann, E., Tian, M., Zhu, J., George, S. M., Lee, Y.-C., & Yang, R. (2013) · Nano Letters · doi:10.1021/nl403244s · Cited by 105
Self-citation
Metadata
- Authors
- Du, Y., & George, S. M.
- Venue
- The Journal of Physical Chemistry C
- Publisher
- American Chemical Society (ACS)
- Published
- 2007-05-26
- Volume
- 111
- Issue
- 24
- Pages
- 8509-8517
- ISSN
- 1932-7447 (ISSN-L)
- 1932-7455
- OpenAlex
- W1972566389
- Cited by
- 173
- References
- 0
- FWCI
- 7.56
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
