Ultralow Thermal Conductivity of Atomic/Molecular Layer-Deposited Hybrid Organic–Inorganic Zincone Thin Films
Abstract
Atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques with atomic level control enable a new class of hybrid organic-inorganic materials with improved functionality. In this work, the cross-plane thermal conductivity and volumetric heat capacity of three types of hybrid organic-inorganic zincone thin films enabled by MLD processes and alternate ALD-MLD processes were measured using the frequency-dependent time-domain thermoreflectance method. We revealed the critical role of backbone flexibility in the structural morphology and thermal conductivity of MLD zincone thin films by comparing the thermal conductivity of MLD zincone films with an aliphatic backbone to that with aromatic backbone. Much lower thermal conductivity values were obtained in ALD/MLD-enabled hybrid organic-inorganic zincone thin films compared to that of the ALD-enabled W/Al2O3 nanolaminates reported by Costescu et al. [Science 2004, 303, 989-990], which suggests that the dramatic material difference between organic and inorganic materials may provide a route for producing materials with ultralow thermal conductivity.
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The ultralow thermal conductivities of the hybrid zincone films are due to alternating layered structures with very different atomic configurations between ALD atomic layers and MLD molecular layers that strongly scatter phonons.
“The ultralow thermal conductivities are due to the alternating layered structures with very different atomic configurations between the ALD atomic layers and the MLD molecular layers that strongly scatter the phonons.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [181]
Very low thermal conductivities of 0.15-0.35 W m-1 K-1 were measured for the hybrid zincone thin films.
“Very low thermal conductivities of 0.15-0.35 W m -1 K -1 were measured for these thin films.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [181]
The heat capacities of the hybrid zincone films were independent of film thickness, while their thermal conductivities changed slightly with film thickness.
“The heat capacities of the hybrid films were found to be independent of the film thickness, while the thermal conductivities changes slightly with the film thickness.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [181]
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- Authors
- Liu, J., Yoon, B., Kuhlmann, E., Tian, M., Zhu, J., George, S. M., Lee, Y.-C., & Yang, R.
- Affiliations
- Department of Mechanical Engineering, University of Colorado, Boulder, Colorado, 80309, United States
- University of Colorado Boulder (US)
- Chinese Academy of Sciences (CN)
- Corresponding author
- Yang, Ronggui
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2013-10-29
- Volume
- 13
- Issue
- 11
- Pages
- 5594-5599
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W2318379119
- Cited by
- 105
- References
- 39
- Citations by year
- 2026: 1 · 2025: 4 · 2024: 5 · 2023: 6 · 2022: 5 · 2021: 5 · 2020: 14 · 2019: 10 · 2018: 9 · 2017: 9 · 2016: 14 · 2015: 14 · 2014: 9
- FWCI
- 5.56
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Nano Letters (publishedVersion)
- PubMed (publishedVersion)
- Funders
- National Natural Science Foundation of China
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Civil and Structural Engineering › Thermal Radiation and Cooling Technologies
- Physical Sciences › Engineering › Mechanics of Materials › Metal and Thin Film Mechanics
- Keywords
- organic-inorganic hybrid materials, molecular layer deposition, atomic layer deposition, ultralow thermal conductivity, volumetric heat capacity, backbone flexibility, through-plane thermal conductivity, time-domain thermoreflectance, thermal insulation
- MeSH terms
- Formazans, Hot Temperature, Inorganic Chemicals, Organic Chemicals, Particle Size, Surface Properties, Thermal Conductivity, Nanotechnology, Biomimetic Materials, Nanostructures
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