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Cited by 413

The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.

Polymer Imprint Lithography with Molecular-Scale Resolution

Hua, Feng, Sun, Yugang, Gaur, Anshu, Meitl, Matthew A., Bilhaut, Lise, Rotkina, Lolita, Wang, Jingfeng, Geil, Phil, Shim, Moonsub, Rogers, John A., Shim, Anne·2004·Nano Letters

Abstract

We show that small diameter, single-walled carbon nanotubes can serve as templates for performing polymer imprint lithography with feature sizes as small as 2 nm − comparable to the size of an individual molecule. The angstrom level uniformity in the critical dimensions of the features provided by this unusual type of template provides a unique ability to investigate systematically the resolution of imprint lithography at this molecular scale. Collective results of experiments with several polymer formulations for the molds and the molded materials suggest that the density of cross-links is an important molecular parameter that influences the ultimate resolution in this process. Optimized materials enable reliable, repetitive patterning in this single nanometer range.

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Crossref · 10.1021/nl048355u

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Metadata

Authors
Hua, F., Sun, Y., Gaur, A., Meitl, M. A., Bilhaut, L., Rotkina, L., Wang, J., Geil, P., Shim, M., Rogers, J. A., & Shim, A.
Venue
Nano Letters
Published
2004-11-13
Volume
4
Issue
12
Pages
2467-2471
ISSN
  • 1530-6984 (ISSN-L)
  • 1530-6992
OpenAlex
W2030706404
Cited by
413
References
1
FWCI
14.64
Type
journal article
Language
en
Open access
closed

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

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