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Toward Nanometer-Scale Optical Photolithography: Utilizing the Near-Field of Bowtie Optical Nanoantennas
Open accessAbstract
Optically resonant metallic bowtie nanoantennas are utilized as fabrication tools for the first time, resulting in the production of polymer resist nanostructures <30 nm in diameter at record low incident multiphoton energy densities. The nanofabrication is accomplished via nonlinear photopolymerization, which is initiated by the enhanced, confined optical fields surrounding the nanoantenna. The position, size, and shape of the resist nanostructures directly correlate with rigorous finite-difference time-domain computations of the field distribution, providing a nanometer-scale measurement of the actual field confinement offered by single optical nanoantennas. In addition, the size of the photoresist regions yields strong upper bounds on photoacid diffusion and resist resolution in SU-8, demonstrating a technique that can be generalized to the study of many current and yet-to-be-developed photoresist systems.
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Cites
Logical computation using algorithmic self-assembly of DNA triple-crossover molecules
Mao, C., LaBean, T. H., Reif, J. H., & Seeman, N. C. (2000) · Nature · doi:10.1038/35035038 · Cited by 779
Cited by
Searching for better plasmonic materials
West, P. R., Ishii, S., Naik, G. V., Emani, N. K., Shalaev, V. M., & Boltasseva, A. (2010) · Laser & Photonics Reviews · doi:10.1002/lpor.200900055 · Cited by 2,116
Plasmonic coupling in noble metal nanostructures
Jain, P. K., & El-Sayed, M. A. (2010) · Chemical Physics Letters · doi:10.1016/j.cplett.2010.01.062 · Cited by 963
Murray, W. A., & Barnes, W. L. (2007) · Advanced Materials · doi:10.1002/adma.200700678 · Cited by 837
Metadata
- Authors
- Sundaramurthy, A., Schuck, P. J., Conley, N. R., Fromm, D. P., Kino, G. S., & Moerner, W. E.
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2006-02-09
- Volume
- 6
- Issue
- 3
- Pages
- 355-360
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W2165498076
- Cited by
- 368
- References
- 1
- FWCI
- 22.18
- Type
- journal article
- Language
- en
- Open access
- green
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