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Kinetic Control of Catalytic CVD for High-Quality Graphene at Low Temperatures
Open accessAbstract
Low-temperature (∼600 °C), scalable chemical vapor deposition of high-quality, uniform monolayer graphene is demonstrated with a mapped Raman 2D/G ratio of >3.2, D/G ratio ≤0.08, and carrier mobilities of ≥3000 cm(2) V(-1) s(-1) on SiO(2) support. A kinetic growth model for graphene CVD based on flux balances is established, which is well supported by a systematic study of Ni-based polycrystalline catalysts. A finite carbon solubility of the catalyst is thereby a key advantage, as it allows the catalyst bulk to act as a mediating carbon sink while optimized graphene growth occurs by only locally saturating the catalyst surface with carbon. This also enables a route to the controlled formation of Bernal stacked bi- and few-layered graphene. The model is relevant to all catalyst materials and can readily serve as a general process rationale for optimized graphene CVD.
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Cited by
Progress, Challenges, and Opportunities in Two-Dimensional Materials Beyond Graphene
Butler, S. Z., Hollen, S. M., Cao, L., Cui, Y., Gupta, J. A., Gutiérrez, H. R., Heinz, T. F., Hong, S. S., Huang, J., Ismach, A. F., et al. (2013) · ACS Nano · doi:10.1021/nn400280c · Cited by 4,878
Rao, R., Pint, C. L., Islam, A. E., Weatherup, R. S., Hofmann, S., Meshot, E. R., Wu, F., Zhou, C., Dee, N., Amama, P. B., et al. (2018) · ACS Nano · doi:10.1021/acsnano.8b06511 · Cited by 588
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Metadata
- Authors
- Weatherup, R. S., Dlubak, B., & Hofmann, S.
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2012-10-08
- Volume
- 6
- Issue
- 11
- Pages
- 9996-10003
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W2313904202
- Cited by
- 176
- References
- 0
- FWCI
- 8.11
- Type
- journal article
- Language
- en
- Open access
- green
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- Weatherup, R. S., Dlubak, B., & Hofmann, S. (2012). Kinetic Control of Catalytic CVD for High-Quality Graphene at Low Temperatures. ACS Nano. https://doi.org/10.1021/nn303674g
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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