The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Highly Scalable, Atomically Thin WSe2 Grown via Metal–Organic Chemical Vapor Deposition
Abstract
Tungsten diselenide (WSe2) is a two-dimensional material that is of interest for next-generation electronic and optoelectronic devices due to its direct bandgap of 1.65 eV in the monolayer form and excellent transport properties. However, technologies based on this 2D material cannot be realized without a scalable synthesis process. Here, we demonstrate the first scalable synthesis of large-area, mono and few-layer WSe2 via metal-organic chemical vapor deposition using tungsten hexacarbonyl (W(CO)6) and dimethylselenium ((CH3)2Se). In addition to being intrinsically scalable, this technique allows for the precise control of the vapor-phase chemistry, which is unobtainable using more traditional oxide vaporization routes. We show that temperature, pressure, Se:W ratio, and substrate choice have a strong impact on the ensuing atomic layer structure, with optimized conditions yielding >8 μm size domains. Raman spectroscopy, atomic force microscopy (AFM), and cross-sectional transmission electron microscopy (TEM) confirm crystalline monoto-multilayer WSe2 is achievable. Finally, TEM and vertical current/voltage transport provide evidence that a pristine van der Waals gap exists in WSe2/graphene heterostructures.
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Cites
Synthesis of MoS 2 and MoSe 2 Films with Vertically Aligned Layers
Kong, D., Wang, H., Cha, J. J., Pasta, M., Koski, K. J., Yao, J., & Cui, Y. (2013) · Nano Letters · doi:10.1021/nl400258t · Cited by 2,250
Cited by
Recent development of two-dimensional transition metal dichalcogenides and their applications
Choi, W., Choudhary, N., Han, G. H., Park, J., Akinwande, D., & Lee, Y. H. (2017) · Materials Today · doi:10.1016/j.mattod.2016.10.002 · Cited by 2,769
Interface-Assisted Synthesis of 2D Materials: Trend and Challenges
Dong, R., Zhang, T., & Feng, X. (2018) · Chemical Reviews · doi:10.1021/acs.chemrev.8b00056 · Cited by 710
Samadi, M., Sarikhani, N., Zirak, M., Zhang, H., Zhang, H.-L., & Moshfegh, A. Z. (2018) · Nanoscale Horizons · doi:10.1039/c7nh00137a · Cited by 408
Li, H., Li, Y., Aljarb, A., Shi, Y., & Li, L.-J. (2018) · Chemical Reviews · doi:10.1021/acs.chemrev.7b00212 · Cited by 382
Xi, C., Xu, W., Zhou, S., Wang, Y., Han, S., & Jiang, J. (2024) · International Journal of Hydrogen Energy · doi:10.1016/j.ijhydene.2024.01.296 · Cited by 11
Metadata
- Authors
- Eichfeld, S. M., Hossain, L., Lin, Y.-C., Piasecki, A. F., Kupp, B., Birdwell, A. G., Burke, R. A., Lu, N., Peng, X., Li, J., Azcatl, A., McDonnell, S., Wallace, R. M., Kim, M. J., Mayer, T. S., Redwing, J. M., & Robinson, J. A.
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2015-02-02
- Volume
- 9
- Issue
- 2
- Pages
- 2080-2087
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W2031885404
- Cited by
- 416
- References
- 1
- FWCI
- 16.65
- Type
- journal article
- Language
- en
- Open access
- closed
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- Eichfeld, S. M., Hossain, L., Lin, Y.-C., Piasecki, A. F., Kupp, B., Birdwell, A. G., Burke, R. A., Lu, N., Peng, X., Li, J., Azcatl, A., McDonnell, S., Wallace, R. M., Kim, M. J., Mayer, T. S., Redwing, J. M., & Robinson, J. A. (2015). Highly Scalable, Atomically Thin WSe2 Grown via Metal–Organic Chemical Vapor Deposition. ACS Nano. https://doi.org/10.1021/nn5073286
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