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Patterned arrays of lateral heterojunctions within monolayer two-dimensional semiconductors
Open accessAbstract
The formation of semiconductor heterojunctions and their high-density integration are foundations of modern electronics and optoelectronics. To enable two-dimensional crystalline semiconductors as building blocks in next-generation electronics, developing methods to deterministically form lateral heterojunctions is crucial. Here we demonstrate an approach for the formation of lithographically patterned arrays of lateral semiconducting heterojunctions within a single two-dimensional crystal. Electron beam lithography is used to pattern MoSe 2 monolayer crystals with SiO 2, and the exposed locations are selectively and totally converted to MoS 2 using pulsed laser vaporization of sulfur to form MoSe 2/MoS 2 heterojunctions in predefined patterns. The junctions and conversion process are studied by Raman and photoluminescence spectroscopy, atomically resolved scanning transmission electron microscopy and device characterization. This demonstration of lateral heterojunction arrays within a monolayer crystal is an essential step for the integration of two-dimensional semiconductor building blocks with different electronic and optoelectronic properties for high-density, ultrathin devices.
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Cites
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Self-citationMolybdenum diselenide (MoSe 2 ) for energy storage, catalysis, and optoelectronics
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Van der Waals heterostructures
Castellanos-Gomez, A., Duan, X., Fei, Z., Gutierrez, H. R., Huang, Y., Huang, X., Quereda, J., Qian, Q., Sutter, E., & Sutter, P. (2022) · Nature Reviews Methods Primers · doi:10.1038/s43586-022-00139-1 · Cited by 423
Samadi, M., Sarikhani, N., Zirak, M., Zhang, H., Zhang, H.-L., & Moshfegh, A. Z. (2018) · Nanoscale Horizons · doi:10.1039/c7nh00137a · Cited by 408
Metadata
- Authors
- Mahjouri-Samani, M., Lin, M.-W., Wang, K., Lupini, A. R., Lee, J., Basile, L., Boulesbaa, A., Rouleau, C. M., Puretzky, A. A., Ivanov, I. N., Xiao, K., Yoon, M., & Geohegan, D. B.
- Venue
- Nature Communications
- Published
- 2015-07-22
- Volume
- 6
- Issue
- 1
- Pages
- 7749-7749
- ISSN
- 2041-1723 (ISSN-L)
- OpenAlex
- W2257939392
- Cited by
- 257
- References
- 27
- FWCI
- 12.26
- Type
- journal article
- Language
- en
- Open access
- gold
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- Mahjouri-Samani, M., Lin, M.-W., Wang, K., Lupini, A. R., Lee, J., Basile, L., Boulesbaa, A., Rouleau, C. M., Puretzky, A. A., Ivanov, I. N., Xiao, K., Yoon, M., & Geohegan, D. B. (2015). Patterned arrays of lateral heterojunctions within monolayer two-dimensional semiconductors. Nature Communications. https://doi.org/10.1038/ncomms8749
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