The DOI matches its Crossref record; 82 of the 82 references it cites were found in a registry or an index.
Nano-opto-electro-mechanical systems
Open accessAbstract
A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from the field of optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, in both the classical and the quantum domains. This Perspective discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation and suggests potential avenues for further developments in this field.
Overview
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
In the citing paper
“Challenges such as hermetic sealing with optical and electrical feedthroughs are solvable88,89.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [88]
Citations
Cites
Kimble, H. J. (2008) · Nature · doi:10.1038/nature07127 · Cited by 6,023
Aspelmeyer, M., Kippenberg, T. J., & Marquardt, F. (2014) · Reviews of Modern Physics · doi:10.1103/revmodphys.86.1391 · Cited by 5,501
Eichenfield, M., Chan, J., Camacho, R. M., Vahala, K. J., & Painter, O. J. (2009) · Nature · doi:10.1038/nature08524 · Cited by 1,087
Carrier-induced change in refractive index of InP, GaAs and InGaAsP
Bennett, B. R., Soref, R. A., & del Alamo, J. A. (1990) · IEEE Journal of Quantum Electronics · doi:10.1109/3.44924 · Cited by 1,032
Aspuru-Guzik, A., & Walther, P. (2012) · Nature Physics · doi:10.1038/nphys2253 · Cited by 952
Quantum technologies with hybrid systems
Kurizki, G., Bertet, P., Kubo, Y., Mølmer, K., Petrosyan, D., Rabl, P., & Schmiedmayer, J. (2015) · Proceedings of the National Academy of Sciences · doi:10.1073/pnas.1419326112 · Cited by 847
Bidirectional and efficient conversion between microwave and optical light
Andrews, R. W., Peterson, R. W., Purdy, T., Cicak, K., Simmonds, R. W., Regal, C. A., & Lehnert, K. W. (2014) · Nature Physics · doi:10.1038/nphys2911 · Cited by 841
Nanomechanical coupling between microwave and optical photons
Bochmann, J., Vainsencher, A., Awschalom, D. D., & Cleland, A. N. (2013) · Nature Physics · doi:10.1038/nphys2748 · Cited by 600
Electrostatic pull-in instability in MEMS/NEMS: A review
Zhang, W., Yan, H., Peng, Z., & Meng, G. (2014) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2014.04.025 · Cited by 571
Fang, K., Luo, J., Metelmann, A., Matheny, M. H., Marquardt, F., Clerk, A. A., & Painter, O. J. (2017) · Nature Physics · doi:10.1038/nphys4009 · Cited by 520
Research works printed but not linked: 12
- Safavi-Naeini, A. H. & Painter, O. Proposal for an optomechanical traveling wave phonon–photon translator. New J. Phys. 13, 013017 (2011).
- Wang, Y.-D. & Clerk, A. A. Using interference for high fidelity quantum state transfer in optomechanics. Phys. Rev. Lett. 108, 153603 (2012).
- Tsang, M. Cavity quantum electro-optics. Phys. Rev. A 81, 063837 (2010).
- Zhang, X., Zhu, N., Zou, C.-L. & Tang, H. X. Optomagnonic whispering gallery microresonators. Phys. Rev. Lett. 117, 123605 (2016).
- Han, S., Seok, T. J., Quack, N., Yoo, B.-W. & Wu, M. C. Large-scale silicon photonic switches with movable directional couplers. Optica 2, 370 (2015).
- Zeuthen, E., Schliesser, A., Sørensen, A. S. & Taylor, J. M. Figures of merit for quantum transducers. Preprint at https://arxiv.org/abs/1610.01099 (2016). · arXiv
- Zou, C.-L., Han, X., Jiang, L. & Tang, H. X. Cavity piezomechanical strong coupling and frequency conversion on an aluminum nitride chip. Phys. Rev. A 94, 013812 (2016).
- Xiong, C., Fan, L., Sun, X. & Tang, H. X. Cavity piezooptomechanics: piezoelectrically excited, optically transduced optomechanical resonators. Appl. Phys. Lett. 102, 021110 (2013).
- Fong, K. Y., Fan, L., Jiang, L., Han, X. & Tang, H. X. Microwave-assisted coherent and nonlinear control in cavity piezo-optomechanical systems. Phys. Rev. A 90, 051801 (2014).
- Fang, K., Yu, Z. & Fan, S. Photonic Aharonov–Bohm effect based on dynamic modulation. Phys. Rev. Lett. 108, 153901 (2012).
- Xu, X.-W., Li, Y., Chen, A.-X. & Liu, Y. Nonreciprocal conversion between microwave and optical photons in electro-optomechanical systems. Phys. Rev. A 93, 023827 (2016).
- Li, J., Lee, H. & Vahala, K. J. Microwave synthesizer using an on-chip Brillouin oscillator. Nat. Commun. 4, 2097 (2013).
Cited by
Sorted by citations
Roadmapping the next generation of silicon photonics
Shekhar, S., Bogaerts, W., Chrostowski, L., Bowers, J. E., Hochberg, M., Soref, R., & Shastri, B. J. (2024) · Nature Communications · doi:10.1038/s41467-024-44750-0 · Cited by 878
Photonic matrix multiplication lights up photonic accelerator and beyond
Zhou, H., Dong, J., Cheng, J., Dong, W., Huang, C., Shen, Y., Zhang, Q., Gu, M., Qian, C., Chen, H., et al. (2022) · Light Science & Applications · doi:10.1038/s41377-022-00717-8 · Cited by 589
Brillouin integrated photonics
Eggleton, B. J., Poulton, C. G., Rakich, P. T., Steel, M. J., & Bahl, G. (2019) · Nature Photonics · doi:10.1038/s41566-019-0498-z · Cited by 402
The Chemistry of Reticular Framework Nanoparticles: MOF, ZIF, and COF Materials
Ploetz, E., Engelke, H., Lächelt, U., & Wuttke, S. (2020) · Advanced Functional Materials · doi:10.1002/adfm.201909062 · Cited by 355
Recent Advances of Ferro-, Piezo-, and Pyroelectric Nanomaterials for Catalytic Applications
Li, S., Zhao, Z., Zhao, J.-Z., Zhang, Z., Li, X., & Zhang, J. (2020) · ACS Applied Nano Materials · doi:10.1021/acsanm.0c00039 · Cited by 335
Metadata
- Authors
- Midolo, L., Schliesser, A., & Fiore, A.
- Affiliations
- University of Copenhagen (DK)
- Eindhoven University of Technology (NL)
- Corresponding author
- Midolo, Leonardo
- Venue
- Nature Nanotechnology
- Published
- 2018-01
- Volume
- 13
- Issue
- 1
- Pages
- 11-18
- ISSN
- 1748-3387 (ISSN-L)
- 1748-3395
- OpenAlex
- W2782313361
- Cited by
- 276
- References
- 82
- Citations by year
- 2026: 25 · 2025: 23 · 2024: 26 · 2023: 34 · 2022: 38 · 2021: 36 · 2020: 41 · 2019: 42 · 2018: 11
- FWCI
- 2.64
- Type
- journal article
- Language
- en
- Update notices
- correction (2018-02-05)
- Open access
- green
- research.tue.nl
- Licence
- Locations
- Nature Nanotechnology (publishedVersion)
- PubMed (publishedVersion)
- TU/e Research Portal (acceptedVersion, other-oa)
- arXiv (Cornell University) (submittedVersion)
- TU/e Research Portal (submittedVersion)
- Figshare (submittedVersion, cc-by)
- Research at the University of Copenhagen (University of Copenhagen) (submittedVersion)
- TU/e Research Portal (submittedVersion, other-oa)
- arXiv (Cornell University)
- Funders
- European Commission (732894, 638765)
- Nederlandse Organisatie voor Wetenschappelijk Onderzoek
- Danmarks Frie Forskningsfond (4002-00060, 4184-00203)
- Stichting voor de Technische Wetenschappen (10380, 12662)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Mechanical and Optical Resonators
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Orbital Angular Momentum in Optics
- Keywords
- optomechanics, photonic nanostructures, lighting control, quantum transduction, nanodevices, physical limits, optical communication, sensing
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review