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Nano-opto-electro-mechanical systems
Open accessAbstract
A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from the field of optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, in both the classical and the quantum domains. This Perspective discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation and suggests potential avenues for further developments in this field.
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“Challenges such as hermetic sealing with optical and electrical feedthroughs are solvable88,89.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [88]
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Metadata
- Authors
- Midolo, L., Schliesser, A., & Fiore, A.
- Affiliations
- University of Copenhagen (DK)
- Eindhoven University of Technology (NL)
- Corresponding author
- Midolo, Leonardo
- Venue
- Nature Nanotechnology
- Published
- 2018-01
- Volume
- 13
- Issue
- 1
- Pages
- 11-18
- ISSN
- 1748-3387 (ISSN-L)
- 1748-3395
- OpenAlex
- W2782313361
- Cited by
- 276
- References
- 82
- Citations by year
- 2026: 25 · 2025: 23 · 2024: 26 · 2023: 34 · 2022: 38 · 2021: 36 · 2020: 41 · 2019: 42 · 2018: 11
- FWCI
- 2.64
- Type
- journal article
- Language
- en
- Update notices
- correction (2018-02-05)
- Open access
- green
- research.tue.nl
- Licence
- Locations
- Nature Nanotechnology (publishedVersion)
- PubMed (publishedVersion)
- TU/e Research Portal (acceptedVersion, other-oa)
- arXiv (Cornell University) (submittedVersion)
- TU/e Research Portal (submittedVersion)
- Figshare (submittedVersion, cc-by)
- Research at the University of Copenhagen (University of Copenhagen) (submittedVersion)
- TU/e Research Portal (submittedVersion, other-oa)
- arXiv (Cornell University)
- Funders
- European Commission (732894, 638765)
- Nederlandse Organisatie voor Wetenschappelijk Onderzoek
- Danmarks Frie Forskningsfond (4002-00060, 4184-00203)
- Stichting voor de Technische Wetenschappen (10380, 12662)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Mechanical and Optical Resonators
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Orbital Angular Momentum in Optics
- Keywords
- optomechanics, photonic nanostructures, lighting control, quantum transduction, nanodevices, physical limits, optical communication, sensing
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Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
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