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Development and application of a microbeam plasma generator
Abstract
A microbeam plasma was successfully generated by using an originally designed capacitively coupled rf plasma reactor which was composed of a needle cathode (1 mm φ), a cylindrical anode (3 mm φ), and a quartz tubing inserted between the cathode and anode. When the reactor was operated in open air and helium was steadily fed as a discharge gas, a plasma beam (φ<2 mm) blew out into air. Conditions for generating a stable plasma were investigated. Preliminary results are presented on the etching of Si by this beam plasma, as well as an emission analysis of the etching plasma.
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Citations
Cited by
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Laroussi, M., & Lu, X. (2005) · Applied Physics Letters · doi:10.1063/1.2045549 · Cited by 637
Cold Plasma in Medicine and Healthcare: The New Frontier in Low Temperature Plasma Applications
Laroussi, M. (2020) · Frontiers in Physics · doi:10.3389/fphy.2020.00074 · Cited by 319
CH4–CO2 reforming by plasma – challenges and opportunities
Tao, X., Bai, M., Li, X., Long, H., Shang, S., Yin, Y., & Dai, X. (2011) · Progress in Energy and Combustion Science · doi:10.1016/j.pecs.2010.05.001 · Cited by 314
Metadata
- Authors
- Koinuma, H., Ohkubo, H., Hashimoto, T., Inomata, K., Shiraishi, T., Miyanaga, A., & Hayashi, S.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1992-02-17
- Volume
- 60
- Issue
- 7
- Pages
- 816-817
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2088887953
- Cited by
- 165
- References
- 0
- FWCI
- 0.93
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Development and application of a microbeam plasma generator. https://app.cochat.ai/papers/10.1063/1.106527
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- Koinuma, H., Ohkubo, H., Hashimoto, T., Inomata, K., Shiraishi, T., Miyanaga, A., & Hayashi, S. (1992). Development and application of a microbeam plasma generator. Applied Physics Letters. https://doi.org/10.1063/1.106527
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
