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Thermal diffusivity measurement of thin films by means of an ac calorimetric method

Hatta, Ichiro, Sasuga, Yasunaga, Kato, Ryozo, Maesono, Akikazu·1985·Review of Scientific Instruments

Abstract

A new method to measure thermal diffusivity of a thin sample was developed using a light-irradiated ac calorimetric technique. The experimental conditions and the fundamental equations for the measurement are discussed. In principle, this method can be applied no matter how thin a sample may be. This method was tested for samples of nickel, silicon, stainless steel, and alumina in the range from 50 to 300 μm in thickness. The measured thermal diffusivities coincide satisfactorily with the values reported for bulk materials. It is concluded that this method is useful in the measurement for thin materials with a variety of thermal diffusivities, and the sample mounting is easy in comparison with other methods.

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Metadata

Authors
Hatta, I., Sasuga, Y., Kato, R., & Maesono, A.
Venue
Review of Scientific Instruments
Published
1985-08-01
Volume
56
Issue
8
Pages
1643-1647
ISSN
  • 0034-6748 (ISSN-L)
  • 1089-7623
OpenAlex
W1963934152
Cited by
217
References
0
FWCI
6.10
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Thermal diffusivity measurement of thin films by means of an ac calorimetric method. https://app.cochat.ai/papers/10.1063/1.1138117
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Hatta, I., Sasuga, Y., Kato, R., & Maesono, A. (1985). Thermal diffusivity measurement of thin films by means of an ac calorimetric method. Review of Scientific Instruments. https://doi.org/10.1063/1.1138117

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.