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Thermal diffusivity measurement of thin films by means of an ac calorimetric method
Abstract
A new method to measure thermal diffusivity of a thin sample was developed using a light-irradiated ac calorimetric technique. The experimental conditions and the fundamental equations for the measurement are discussed. In principle, this method can be applied no matter how thin a sample may be. This method was tested for samples of nickel, silicon, stainless steel, and alumina in the range from 50 to 300 μm in thickness. The measured thermal diffusivities coincide satisfactorily with the values reported for bulk materials. It is concluded that this method is useful in the measurement for thin materials with a variety of thermal diffusivities, and the sample mounting is easy in comparison with other methods.
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Cited by
Capinski, W. S., Maris, H. J., Ruf, T., Cardona, M., Ploog, K., & Katzer, D. S. (1999) · Physical Review B · doi:10.1103/physrevb.59.8105 · Cited by 471
Thermal properties of AlAs/GaAs superlattices
Yao, T. (1987) · Applied Physics Letters · doi:10.1063/1.98526 · Cited by 290
Anisotropic thermal-diffusivity measurements by a new laser-spot-heating technique
Kato, H., Baba, T., & Okaji, M. (2001) · Measurement Science and Technology · doi:10.1088/0957-0233/12/12/307 · Cited by 48
Thermal Transport and Thermal Diffusivity by Laser Flash Technique: A Review
Sundar, R., & Sudha, C. (2025) · International Journal of Thermophysics · doi:10.1007/s10765-024-03479-0 · Cited by 43
Peak Diffusing Measurement Method for Estimating Thermal Diffusivity of Thin Films
Dong, H. L., Zheng, B. Y., & Chen, F. F. (2014) · Advanced Materials Research · doi:10.4028/www.scientific.net/amr.1035.166 · Cited by 2
Metadata
- Authors
- Hatta, I., Sasuga, Y., Kato, R., & Maesono, A.
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 1985-08-01
- Volume
- 56
- Issue
- 8
- Pages
- 1643-1647
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W1963934152
- Cited by
- 217
- References
- 0
- FWCI
- 6.10
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Thermal diffusivity measurement of thin films by means of an ac calorimetric method. https://app.cochat.ai/papers/10.1063/1.1138117
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- Hatta, I., Sasuga, Y., Kato, R., & Maesono, A. (1985). Thermal diffusivity measurement of thin films by means of an ac calorimetric method. Review of Scientific Instruments. https://doi.org/10.1063/1.1138117
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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