The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K
Abstract
A new microcalorimeter for measuring heat capacity of thin films in the range 1.5–800 K is described. Semiconductor processing techniques are used to create a device with an amorphous silicon nitride membrane as the sample substrate, a Pt thin film resistor for temperatures greater than 40 K, and either a thin film amorphous Nb–Si or a novel boron-doped polycrystalline silicon thermometer for lower temperatures. The addenda of the device, including substrate, is 4×10−6 J/K at room temperature and 2×10−9 J/K at 4.3 K, approximately two orders of magnitude less than any existing calorimeter used for measuring thin films. The device is capable of measuring the heat capacity of thin film samples as small as a few micrograms.
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Citations
Cites
Thermal Conductivity and Specific Heat of Noncrystalline Solids
Zeller, R. C., & Pohl, R. O. (1971) · Physical Review B · doi:10.1103/physrevb.4.2029 · Cited by 1,954
Cited by
Si-N membrane-based microcalorimetry: Heat capacity and thermal conductivity of thin films
Revaz, B., Zink, B. L., & Hellman, F. (2005) · Thermochimica Acta · doi:10.1016/j.tca.2005.04.004 · Cited by 43
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Metadata
- Authors
- Denlinger, D. W., Abarra, E. N., Allen, K., Rooney, P. W., Messer, M. T., Watson, S. K., & Hellman, F.
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 1994-04-01
- Volume
- 65
- Issue
- 4
- Pages
- 946-959
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W1989573808
- Cited by
- 248
- References
- 1
- FWCI
- 4.76
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K. https://app.cochat.ai/papers/10.1063/1.1144925
- The paper
- Denlinger, D. W., Abarra, E. N., Allen, K., Rooney, P. W., Messer, M. T., Watson, S. K., & Hellman, F. (1994). Thin film microcalorimeter for heat capacity measurements from 1.5 to 800 K. Review of Scientific Instruments. https://doi.org/10.1063/1.1144925
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
