The DOI matches its Crossref record; 9 of the 9 references it cites were found in a registry or an index.
Fabrication of single-crystal lithium niobate films by crystal ion slicing
Abstract
We report on the implementation of crystal ion slicing in lithium niobate (LiNbO3). Deep-ion implantation is used to create a buried sacrificial layer in single-crystal c-cut poled wafers of LiNbO3, inducing a large etch selectivity between the sacrificial layer and the rest of the sample. 9-μm-thick films of excellent quality are separated from the bulk and bonded to silicon and gallium arsenide substrates. These single-crystal films have the same room-temperature dielectric and pyroelectric characteristics, and ferroelectric transition temperature as single-crystal bulk. A stronger high-temperature pyroelectric response is found in the films.
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Citations
Cites
Extreme selectivity in the lift-off of epitaxial GaAs films
Yablonovitch, E., Gmitter, T., Harbison, J. P., & Bhat, R. (1987) · Applied Physics Letters · doi:10.1063/1.98946 · Cited by 817
Rost, T. A., Lin, H., Rabson, T. A., Baumann, R., & Callahan, D. L. (1992) · Journal of Applied Physics · doi:10.1063/1.352197 · Cited by 79
Epitaxial MgO on GaAs(111) as a buffer layer for z-cut epitaxial lithium niobate
FORK, D. K., & Anderson, G. B. (1993) · Applied Physics Letters · doi:10.1063/1.109824 · Cited by 78
Preparation and characterization of LiNbO3 thin films produced by chemical-vapor deposition
Sakashita, Y., & Segawa, H. (1995) · Journal of Applied Physics · doi:10.1063/1.359183 · Cited by 76
Growth of highly textured LiNbO3 thin film on Si with MgO buffer layer through the sol-gel process
Yoon, J., & Kim, K. (1996) · Applied Physics Letters · doi:10.1063/1.115842 · Cited by 68
Linear electro-optic effect in sputtered polycrystalline LiNbO3 films
Griffel, G., Ruschin, S., & Croitoru, N. I. (1989) · Applied Physics Letters · doi:10.1063/1.101406 · Cited by 56
Epitaxial liftoff of thin oxide layers: Yttrium iron garnets onto GaAs
Levy, M., Osgood, R. M., Kumar, A., et al. (1997) · Applied Physics Letters · doi:10.1063/1.120192 · Cited by 54
Self-citationLee, S.-H., Song, T. K., Noh, T. W., & Lee, J.-H. (1995) · Applied Physics Letters · doi:10.1063/1.115486 · Cited by 48
The role of Si3N4 layers in determining the texture of sputter deposited LiNbO3 thin films
Tan, S. S., Schlesinger, T. E., & Migliuolo, M. (1996) · Applied Physics Letters · doi:10.1063/1.116270 · Cited by 39
Cited by
Integrated photonics on thin-film lithium niobate
Zhu, D., Shao, L., Yu, M., Cheng, R., Desiatov, B., Xin, C. J., Hu, Y., Holzgrafe, J., Ghosh, S., Shams-Ansari, A., et al. (2021) · Advances in Optics and Photonics · doi:10.1364/aop.411024 · Cited by 1,516
Lithium niobate on insulator (LNOI) for micro‐photonic devices
Poberaj, G., Hu, H., Sohler, W., & Günter, P. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100035 · Cited by 631
Integrated lithium niobate electro-optic modulators: when performance meets scalability
Zhang, M., Wang, C., Kharel, P., Zhu, D., & Lončar, M. (2021) · Optica · doi:10.1364/optica.415762 · Cited by 489
Integrated lithium niobate photonics
Qi, Y., & Li, Y. (2020) · Nanophotonics · doi:10.1515/nanoph-2020-0013 · Cited by 422
Advances in on-chip photonic devices based on lithium niobate on insulator
Lin, J., Bo, F., Cheng, Y., & Xu, J. (2020) · Photonics Research · doi:10.1364/prj.395305 · Cited by 377
Metadata
- Authors
- Levy, M., Osgood, R. M., Liu, R., Cross, L. E., Cargill, G. S., Kumar, A., & Bakhru, H.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1998-10-19
- Volume
- 73
- Issue
- 16
- Pages
- 2293-2295
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2000432206
- Cited by
- 349
- References
- 9
- FWCI
- 6.06
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Fabrication of single-crystal lithium niobate films by crystal ion slicing. https://app.cochat.ai/papers/10.1063/1.121801
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- Levy, M., Osgood, R. M., Liu, R., Cross, L. E., Cargill, G. S., Kumar, A., & Bakhru, H. (1998). Fabrication of single-crystal lithium niobate films by crystal ion slicing. Applied Physics Letters. https://doi.org/10.1063/1.121801
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
