The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Microstructuring of silicon with femtosecond laser pulses
Abstract
We report that silicon surfaces develop an array of sharp conical spikes when irradiated with 500 laser pulses of 100-fs duration, 10-kJ/m2 fluence in 500-Torr SF6 or Cl2. The spikes are up to 40-μm tall, and taper to about 1-μm diam at the tip. Irradiation of silicon surfaces in N2, Ne, or vacuum creates structured surfaces, but does not create sharp conical spikes.
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Citations
Cites
Three-dimensional optical storage inside transparent materials
Glezer, E. N., Milosavljevic, M., Huang, L., Finlay, R. J., Her, T.-H., Callan, J. P., & Mazur, E. (1996) · Optics Letters · doi:10.1364/ol.21.002023 · Cited by 985
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Ultrafast lasers—reliable tools for advanced materials processing
Sugioka, K., & Cheng, Y. (2014) · Light: Science & Applications · doi:10.1038/lsa.2014.30 · Cited by 1,545
Broadband omnidirectional antireflection coating based on subwavelength surface Mie resonators
Spinelli, P., Verschuuren, M. A., & Polman, A. (2012) · Nature Communications · doi:10.1038/ncomms1691 · Cited by 867
Bonse, J., Brzezinka, K.-W., & Meixner, A. J. (2004) · Applied Surface Science · doi:10.1016/s0169-4332(03)00881-x · Cited by 254
Enhancement of pulsed laser ablation in environmentally friendly liquid
Luo, F., Guan, Y., Ong, W., Du, Z., Ho, G., Li, F., Sun, S., Lim, G., & Hong, M. (2014) · Optics Express · doi:10.1364/oe.22.023875 · Cited by 24
Metadata
- Authors
- Her, T.-H., Finlay, R. J., Wu, C., Deliwala, S., & Mazur, E.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1998-09-21
- Volume
- 73
- Issue
- 12
- Pages
- 1673-1675
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2022375783
- Cited by
- 813
- References
- 1
- FWCI
- 7.91
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Microstructuring of silicon with femtosecond laser pulses. https://app.cochat.ai/papers/10.1063/1.122241
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- Her, T.-H., Finlay, R. J., Wu, C., Deliwala, S., & Mazur, E. (1998). Microstructuring of silicon with femtosecond laser pulses. Applied Physics Letters. https://doi.org/10.1063/1.122241
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
