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Cited by 33Low-Pressure Plasma Processing and DiagnosticsMagnetic confinement fusion researchVacuum and Plasma Arcs

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On nonlinear effects in inductively coupled plasmas

Smolyakov, A., Godyak, V., Duffy, A.·2000·Physics of Plasmas
DOI 10.1063/1.1311803
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Abstract

Nonlinear current and potential oscillations in low pressure inductively coupled plasmas are analyzed within the framework of electron magnetohydrodynamics. It is shown that both current and potential oscillations can be attributed, respectively, to the solenoidal and potential components of nonlinear Lorentz and inertial forces. Scaling of the nonlinear force with the phase shift between the electric current and the electric field is analyzed. It is demonstrated that the solenoidal part of the force that provides a source of nonlinear current vanishes in neglect of collisions and collisionless absorption, while oscillations of the electrostatic potential remain finite. It is shown that these oscillations are the result of plasma polarization due to Hall drifts.

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  • PIC algorithms based on electric field estimates resulting from the quasi-neutrality ansatz rather than Poisson's equation, used for ECR and ICP discharge modeling, remove plasma oscillations.

    “An appropriate example would be the PIC algorithms based on the electric field estimates resulting from the quasi-neutrality ansatz rather than Poisson's equation, used for ECR 138 and ICP 139 discharge modeling, which removes plasma oscillations.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [138]

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Research works printed but not linked: 34

  1. 1997, Phys. Rev. Lett., 79, 4589, 10.1103/PhysRevLett.79.4589 · DOI
  2. 1998, Phys. Rev. Lett., 80, 3264, 10.1103/PhysRevLett.80.3264 · DOI
  3. 1996, Phys. Rev. Lett., 77, 1286, 10.1103/PhysRevLett.77.1286 · DOI
  4. 1999, Phys. Plasmas, 6, 1804, 10.1063/1.873438 · DOI
  5. 1998, IEEE Trans. Plasma Sci., 26, 955, 10.1109/27.700878 · DOI
  6. 1998, Phys. Plasmas, 5, 1198, 10.1063/1.872649 · DOI
  7. 1997, Phys. Plasmas, 4, 1922, 10.1063/1.872335 · DOI
  8. 1996, Phys. Plasmas, 3, 3300, 10.1063/1.871598 · DOI
  9. 1997, Phys. Plasmas, 4, 3163, 10.1063/1.872455 · DOI
  10. 1997, Plasma Sources Sci. Technol., 6, 540, 10.1088/0963-0252/6/4/012 · DOI
  11. 1997, Phys. Rev. E, 55, 3408, 10.1103/PhysRevE.55.3408 · DOI
  12. 1998, Plasma Sources Sci. Technol., 7, 83, 10.1088/0963-0252/7/2/002 · DOI
  13. 1999, Plasma Sources Sci. Technol., 8, 313, 10.1088/0963-0252/8/2/312 · DOI
  14. 1993, Phys. Rev. Lett., 71, 1844, 10.1103/PhysRevLett.71.1844 · DOI
  15. 1996, Phys. Rev. E, 54, 757, 10.1103/PhysRevE.54.757 · DOI
  16. 1997, Phys. Rev. E, 55, 7536, 10.1103/PhysRevE.55.7536 · DOI
  17. 1996, Phys. Plasmas, 3, 1839, 10.1063/1.871979 · DOI
  18. 1996, Plasma Sources Sci. Technol., 5, 442, 10.1088/0963-0252/5/3/013 · DOI
  19. 1997, Phys. Plasmas, 4, 2413, 10.1063/1.872222 · DOI
  20. 1998, Plasma Sources Sci. Technol., 7, 162, 10.1088/0963-0252/7/2/011 · DOI
  21. 1999, Phys. Rev. Lett., 83, 1610, 10.1103/PhysRevLett.83.1610 · DOI
  22. 1999, J. Appl. Phys., 85, 703, 10.1063/1.369150 · DOI
  23. 1998, Phys. Rev. Lett., 81, 4871, 10.1103/PhysRevLett.81.4871 · DOI
  24. 1994, Phys. Rep., 243, 215, 10.1016/0370-1573(94)90097-3 · DOI
  25. 1995, IEEE Trans. Plasma Sci., 23, 550, 10.1109/27.467974 · DOI
  26. 1994, J. Vac. Sci. Technol. B, 12, 507, 10.1116/1.587106 · DOI
  27. 1999, Bull. Am. Phys. Soc., 44, 11
  28. 1997, Bull. Am. Phys. Soc., 42, 1717
  29. 1993, Tech. Phys. Lett., 19, 276
  30. 1968, Sov. Phys. JETP, 27, 1014
  31. 1988, Phys. Fluids, 31, 1377
  32. 1996, Phys. Plasmas, 3, 2742, 10.1063/1.871530 · DOI
  33. 2000, Phys. Plasmas, 7, 122, 10.1063/1.873787 · DOI
  34. 1970, Phys. Fluids, 10, 741

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Metadata

Authors
Smolyakov, A., Godyak, V., & Duffy, A.
Affiliations
  • University of Saskatchewan (CA)
  • OSRAM SYLVANIA, Beverly, Massachusetts 01915
ORCID
Venue
Physics of Plasmas
Publisher
AIP Publishing
Published
2000-11-01
Volume
7
Issue
11
Pages
4755-4762
ISSN
  • 1070-664X (ISSN-L)
  • 1089-7674
DOI
10.1063/1.1311803
OpenAlex
W3035654283
Cited by
33
References
0
Citations by year
2026: 1 · 2024: 2 · 2023: 3 · 2021: 1 · 2020: 2 · 2013: 1
FWCI
3.46
Type
journal article
Language
en
Open access
closed
Locations
Physics of Plasmas (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Physics and Astronomy › Nuclear and High Energy Physics › Magnetic confinement fusion research
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
Keywords
inductively coupled plasma, electron magnetohydrodynamics, Lorentz force, inertial forces, collisionless absorption, plasma polarization, Hall drift, low-pressure plasma

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