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Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Austin, Michael D., Chou, Stephen Y.·2002·Applied Physics Letters

Abstract

We report on the fabrication of short-channel polymer organic thin-film transistors (OTFTs) using nanoimprint lithography. Currently, there is significant interest in OTFTs due to their potential application in inexpensive, large-area electronics. However, polymer carrier mobilities are typically poor, and thus to increase the OTFT drive current per unit area, there is a need for short-channel devices. We have fabricated working devices with channel lengths from 1 μm down to 70 nm with high yields. The performance of these devices was studied as the channel length was reduced. We find that drive current density increases as expected, while the on/off current ratio remains 104. However, at short-channel lengths, OTFTs no longer saturate due to space charge limiting current effects.

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Metadata

Authors
Austin, M. D., & Chou, S. Y.
Venue
Applied Physics Letters
Published
2002-12-02
Volume
81
Issue
23
Pages
4431-4433
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W2071759462
Cited by
243
References
0
FWCI
15.77
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography. https://app.cochat.ai/papers/10.1063/1.1526457
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Austin, M. D., & Chou, S. Y. (2002). Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography. Applied Physics Letters. https://doi.org/10.1063/1.1526457

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Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.