The DOI matches its Crossref record; 41 of the 41 references it cites were found in a registry or an index.
Recent progress in nanoimprint technology and its applications
Open accessAbstract
Nanoimprint is an emerging lithographic technology that promises high-throughput patterning of nanostructures. Based on the mechanical embossing principle, nanoimprint technique can achieve pattern resolutions beyond the limitations set by the light diffractions or beam scatterings in other conventional techniques. This article reviews the basic principles of nanoimprint technology and some of the recent progress in this field. It also explores a few alternative approaches that are related to nanoimprint as well as additive approaches for patterning polymer structures. Nanoimprint technology can not only create resist patterns as in lithography but can also imprint functional device structures in polymers. This property is exploited in several non-traditional microelectronic applications in the areas of photonics and biotechnology.
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Cites
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Cited by
Micro- and Nanopatterning Techniques for Organic Electronic and Optoelectronic Systems
Menard, E., Meitl, M. A., Sun, Y., Park, J.-U., Shir, D. J.-L., Nam, Y.-S., Jeon, S., & Rogers, J. A. (2007) · Chemical Reviews · doi:10.1021/cr050139y · Cited by 658
Characterization of topographical effects on macrophage behavior in a foreign body response model
Chen, S., Jones, J. A., Xu, Y., Low, H.-Y., Anderson, J. M., & Leong, K. W. (2010) · Biomaterials · doi:10.1016/j.biomaterials.2010.01.074 · Cited by 389
A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold
Fu, X., Chen, Q., Chen, X., Zhang, L., Yang, A., Cui, Y., Yuan, C., & Ge, H. (2019) · Micromachines · doi:10.3390/mi10050334 · Cited by 17
Metadata
- Authors
- Guo, L. J.
- Venue
- Journal of Physics D: Applied Physics
- Publisher
- IOP Publishing
- Published
- 2004-05-13
- Volume
- 37
- Issue
- 11
- Pages
- R123-R141
- ISSN
- 0022-3727 (ISSN-L)
- 1361-6463
- OpenAlex
- W2049736064
- Cited by
- 733
- References
- 41
- FWCI
- 36.34
- Type
- journal article
- Language
- en
- Open access
- bronze
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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