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Cited by 11Low-Pressure Plasma Processing and DiagnosticsMagnetic confinement fusion researchVacuum and Plasma Arcs

Nonlinear electromagnetic fields in 0.5 MHz inductively coupled plasmas

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Ostrikov, K., Tsakadze, E., Xu, S., Vladimirov, S. V., Storer, R.·2003·Physics of Plasmas
DOI 10.1063/1.1557871
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Abstract

Radial profiles of magnetic fields in the electrostatic (E) and electromagnetic (H) modes of low-frequency (∼500 kHz) inductively coupled plasmas have been measured using miniature magnetic probes. In the low-power (∼170 W) E-mode, the magnetic field pattern is purely linear, with the fundamental frequency harmonics only. After transition to higher-power (∼1130 W) H-mode, the second-harmonic nonlinear azimuthal magnetic field Bφ2ω that is in 4–6 times larger than the fundamental frequency component Bφω, has been observed. A simplified plasma fluid model explaining the generation of the second harmonics of the azimuthal magnetic field in the plasma source is proposed. The nonlinear second harmonic poloidal (r−z) rf current generating the azimuthal magnetic field Bφ2ω is attributed to nonlinear interactions between the fundamental frequency radial and axial magnetic fields with the azimuthal rf current.

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  • The induced magnetic field can affect electron orbits, which is important when kinetic and non-local phenomena play out, leading to the anomalous skin effect and the ponderomotive force.

    “The induced magnetic field can affect electron orbits, which is important when kinetic and non-local phenomena play out, leading to the anomalous skin effect and the ponderomotive force 139,150 .”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [139]

    Section III (Fluid Model; page unavailable) includes a magnetic-field term in the force on electrons and identifies a static nonlinear response as the ponderomotive force. Section IV (Discussion; page unavailable) also discusses a nonlinear Lorentz force. The paper does not connect these effects to kinetic or non-local phenomena or to the anomalous skin effect. (LLM, conf=0.85)

    Experimental — accuracy not yet measured

  • PIC algorithms based on electric field estimates resulting from the quasi-neutrality ansatz rather than Poisson's equation, used for ECR and ICP discharge modeling, remove plasma oscillations.

    “An appropriate example would be the PIC algorithms based on the electric field estimates resulting from the quasi-neutrality ansatz rather than Poisson's equation, used for ECR 138 and ICP 139 discharge modeling, which removes plasma oscillations.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [139]

    The Introduction discusses ICP modeling generally, and Section III describes a fluid model of nonlinear electromagnetic fields; neither addresses the claimed PIC algorithm. Searches for quasi-neutrality, Poisson’s equation, particle-in-cell simulation, and plasma oscillations found no passage supporting the attributed claim. Page numbers were not available in our copy. (LLM, conf=0.75)

    Experimental — accuracy not yet measured

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Cites

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Research works printed but not linked: 23

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Cited by

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Authors
Ostrikov, K., Tsakadze, E., Xu, S., Vladimirov, S. V., & Storer, R.
Affiliations
  • Flinders University (AU)
  • Nanyang Technological University (SG)
  • The University of Sydney (AU)
ORCID
Venue
Physics of Plasmas
Publisher
AIP Publishing
Published
2003-04-01
Volume
10
Issue
4
Pages
1146-1151
ISSN
  • 1070-664X (ISSN-L)
  • 1089-7674
DOI
10.1063/1.1557871
OpenAlex
W2034346569
Cited by
11
References
0
Citations by year
2023: 3 · 2019: 1
FWCI
1.00
Type
journal article
Language
en
Open access
Locations
  • Physics of Plasmas (publishedVersion)
  • QUT ePrints (Queensland University of Technology) (submittedVersion)
  • Flinders Academic Commons (Flinders University) (submittedVersion)
  • Technical University of Denmark, DTU Orbit (Technical University of Denmark, DTU) (submittedVersion)
Funders
  • Agency for Science, Technology and Research
  • Australian Research Council
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Physics and Astronomy › Nuclear and High Energy Physics › Magnetic confinement fusion research
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
Keywords
inductively coupled plasma, low-frequency plasma, nonlinear electromagnetic field, azimuthal magnetic field, electrostatic modes, magnetic field distribution, poloidal current, plasma fluid model

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