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Microfabricated alkali atom vapor cells
Abstract
We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.
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Cited by
Kitching, J. (2018) · Applied Physics Reviews · doi:10.1063/1.5026238 · Cited by 621
Self-citationChip-scale atomic magnetometer
Schwindt, P. D. D., Knappe, S., Shah, V., Hollberg, L., Kitching, J., Liew, L.-A., & Moreland, J. (2004) · Applied Physics Letters · doi:10.1063/1.1839274 · Cited by 481
Self-citationMeasuring MEG Closer to the Brain: Performance of on-Scalp Sensor Arrays
Iivanainen, J., Stenroos, M., & Parkkonen, L. (2017) · NeuroImage · doi:10.1016/j.neuroimage.2016.12.048 · Cited by 296
“Thus, compared to the state-of-the-art OPMs, our hypothetical OPMs are optimistic in design; however, we anticipate that the distance between the vapor cell and the outer surface of the sensor will shrink in the next generation OPMs due to advances in sensor packaging and in the utilization of microfabrication (Liew e…”
Metadata
- Authors
- Liew, L.-A., Knappe, S., Moreland, J., Robinson, H., Hollberg, L., & Kitching, J.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2004-04-05
- Volume
- 84
- Issue
- 14
- Pages
- 2694-2696
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2167136240
- Cited by
- 374
- References
- 0
- FWCI
- 15.36
- Type
- journal article
- Language
- en
- Open access
- closed
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- Liew, L.-A., Knappe, S., Moreland, J., Robinson, H., Hollberg, L., & Kitching, J. (2004). Microfabricated alkali atom vapor cells. Applied Physics Letters. https://doi.org/10.1063/1.1691490
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