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Semiconductor Surface Damage Produced by Ruby Lasers
Abstract
Semiconductor surface damage, produced by a focused beam of ruby laser light, consisted of regular patterns of cracks and a system of parallel straight lines. The system of grooves (spacing of about 0.0001 cm) can be explained on the basis of diffraction effects at the focus of a lens. The regular crack patterns were related to the cleavage habits of the semiconductors by x-ray analysis. (Author)
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Citations
Cited by
Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining
Ahmmed, K., Grambow, C., & Kietzig, A.-M. (2014) · Micromachines · doi:10.3390/mi5041219 · Cited by 466
Gnilitskyi, I., Derrien, T. J.-Y., Levy, Y., Bulgakova, N. M., Mocek, T., & Orazi, L. (2017) · Scientific Reports · doi:10.1038/s41598-017-08788-z · Cited by 363
Femtosecond laser-induced periodic surface structure on diamond film
Wu, Q., Ma, Y., Fang, R., Liao, Y., Yu, Q., Chen, X., & Wang, K. (2003) · Applied Physics Letters · doi:10.1063/1.1561581 · Cited by 263
Lazarev, G., Chen, P.-J., Strauss, J., Fontaine, N., & Forbes, A. (2019) · Optics Express · doi:10.1364/oe.27.016206 · Cited by 175
Ultrafast Laser Direct Writing Nanogratings and their Engineering in Transparent Materials
Yao, H., Pugliese, D., Lancry, M., & Dai, Y. (2024) · Laser & Photonics Reviews · doi:10.1002/lpor.202300891 · Cited by 115
Metadata
- Authors
- Birnbaum, M.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 1965-11-01
- Volume
- 36
- Issue
- 11
- Pages
- 3688-3689
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2063822356
- Cited by
- 943
- References
- 0
- FWCI
- 2.12
- Type
- journal article
- Language
- en
- Open access
- closed
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