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Solid-state dewetting for ordered arrays of crystallographically oriented metal particles
Abstract
We demonstrate that topographically modified substrates can be used as templates to control solid-state dewetting of thin films by creating a periodic variation in the initial curvature of the film. The dewetting of gold films on oxidized silicon surfaces patterned with arrays of inverted pyramid shaped pits is investigated. For specific ranges of relative film thickness and topographic dimension, dewetting results in arrays of submicrometer-scale particles with uniform periodic spacing and nearly uniform size and crystallographic orientation.
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Citations
Cited by
Templated Self‐Assembly of Block Copolymers: Top‐Down Helps Bottom‐Up
Cheng, J. Y., Ross, C. A., Smith, H. I., & Thomas, E. L. (2006) · Advanced Materials · doi:10.1002/adma.200502651 · Cited by 695
Metadata
- Authors
- Giermann, A. L., & Thompson, C. V.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2005-03-14
- Volume
- 86
- Issue
- 12
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2028812364
- Cited by
- 218
- References
- 0
- FWCI
- 6.45
- Type
- journal article
- Language
- en
- Open access
- closed
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- Giermann, A. L., & Thompson, C. V. (2005). Solid-state dewetting for ordered arrays of crystallographically oriented metal particles. Applied Physics Letters. https://doi.org/10.1063/1.1885180
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.