Dielectric SiO2/ZrO2 Distributed Bragg Reflectors for ZnO Microcavities Prepared by the Reactive Helicon-Wave-Excited-Plasma Sputtering Method
Abstract
Reactive helicon-wave-excited-plasma sputtering method is shown to be a suitable technique for the fabrication of high reflectivity (R) distributed Bragg reflectors (DBRs), in particular, operating at the resonance wavelength of B excitons in ZnO (366.5nm), utilizing quarter-wavelength multilayers of SiO2 and ZrO2 dielectric films. According to the surface-damage-free nature and proper stoichiometry controllability of the method, dense dielectric films exhibiting ideal refractive indices (1.46 for SiO2 and 2.10 for ZrO2 at 633nm) and small root-mean-square values for the surface roughness (0.20nm for SiO2 and 0.53nm for ZrO2) were deposited using Si and Zr targets and O2 gas at room temperature. Optical reflectance spectra of the SiO2∕ZrO2 DBRs agreed with those calculated using the optical multilayer film theory, and eight-pair DBR exhibited R higher than 99.5% at 366.5nm and 82nm stop bandwidth (R⩾95%). The results indicate that the DBR can be used for the realization of polariton lasers using ZnO microcavities.
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Silicon dioxide (SiO2) is the most commonly used material to fabricate dielectric mirrors.
“The most commonly used material to fabricate dielectric mirrors is silicon dioxide (SiO2).”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [28]
The SiO2/TiO2 pair offers the largest optical contrast, making it suitable for high-reflectance dielectric mirrors with a smaller number of pairs and sharper stopbands.
“However, the pair SiO2/TiO2 offers the largest optical contrast, rendering it perfect for high-reflectance dielectric mirrors with a smaller number of pairs and sharper stopbands.”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [28]
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References 23 · Cited by 43
- Authors
- Chichibu, S. F., Ohmori, T., Shibata, N., & Koyama, T.
- Affiliations
- University of Tsukuba (JP)
- ORCID
- Chichibu, S. F.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2006-04-17
- Volume
- 88
- Issue
- 16
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W1975447447
- Cited by
- 43
- References
- 23
- Citations by year
- 2024: 2 · 2022: 2 · 2021: 7 · 2020: 2 · 2019: 1 · 2018: 4 · 2017: 2 · 2015: 2 · 2014: 3 · 2013: 2 · 2012: 2
- FWCI
- 1.96
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Materials Science › Materials Chemistry › ZnO doping and properties
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Strong Light-Matter Interactions
- Keywords
- distributed Bragg reflector, B exciton, high reflectivity, surface roughness, refractive index tuning, polariton lasers
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