Layer-by-layer photonic crystal fabricated by low-temperature atomic layer deposition
Abstract
Layer-by-layer three-dimensional photonic crystals are fabricated by low-temperature atomic layer deposition of titanium dioxide on a polymer template created by soft lithography. With a highly conformal layer of titanium dioxide, a significantly enhanced photonic band gap effect appears at 3.1μm in transmittance and reflectance. From optical investigations of systematically shifted structures, the robust nature of the photonic band gap with respect to structural fluctuations is confirmed experimentally. With angle-resolved Fourier-transform spectroscopy, the authors also demonstrate that the fabricated photonic crystal can be a diffraction-free device as the photonic band gap exists over the diffracting regime.
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The proposed photonic crystals can in principle be fabricated using layer-by-layer methods with current technology for infrared frequencies.
“These PhCs can in principle be fabricated using layer-by-layer methods with the current technology 38,39 for infrared frequencies.”
From Type-II Dirac photons (2017) · cites this paper as [38]
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Wang, H.-X., Chen, Y., Hang, Z. H., Kee, H.-Y., & Jiang, J.-H. (2017) · npj Quantum Materials · doi:10.1038/s41535-017-0058-z · Cited by 70 · see citing works
- Authors
- Lee, J.-H., Leung, W., Ahn, J., Lee, T., Park, I.-S., Constant, K., & Ho, K.-M.
- Affiliations
- Iowa State University (US)
- Hanyang University (KR)
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2007-04-09
- Volume
- 90
- Issue
- 15
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2079126478
- Cited by
- 20
- References
- 0
- Citations by year
- 2025: 1 · 2021: 1 · 2019: 2 · 2018: 2 · 2017: 1 · 2016: 2 · 2014: 2
- FWCI
- 1.43
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Iowa State University Digital Repository (Iowa State University) (submittedVersion)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photonic Crystals and Applications
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Keywords
- photonic crystals, titanium dioxide, atomic layer deposition, polymer templates, soft lithography, photonic band gap, low-temperature deposition, structural fluctuations, mid-infrared optics
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