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Cited by 21Low-Pressure Plasma Processing and DiagnosticsAtmospheric-Pressure Plasma ApplicationsMicrowave-Assisted Synthesis and Applications

The DOI matches its Crossref record.

Two-dimensional electromagnetic model of a microwave plasma reactor operated by an axial injection torch

Álvarez, R., Alves, L. L.·2007·Journal of Applied Physics
DOI 10.1063/1.2732508
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Abstract

This paper presents a two-dimensional electromagnetic model for a microwave (2.45 GHz) plasma reactor operated by an axial injection torch. The model solves Maxwell’s equations, adopting a harmonic time description and considering the collision dispersion features of the plasma. Perfect-conductor boundary conditions are satisfied at the reactor walls, and absorbing boundary conditions are used at the open end of the coaxial waveguide powering the system. Simulations yield the distribution of the electromagnetic fields and the average power absorbed by the system for a given spatial profile of the plasma density (tailored from previous experimental measurements), with maximum values in the range 1014−1015 cm−3. Model results reveal that the system exhibits features similar to those of an air-filled, one-end-shorted circular metal waveguide, supporting evanescent or oscillatory solutions for radial dimensions below or above a critical radius, respectively. Results also show that the fractional average power absorbed by the plasma is strongly influenced by the system dimensions, which play a major role in defining the geometry pattern of the electromagnetic field distribution. Simulations are used to provide general guidelines for device optimization.

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Crossref · 10.1063/1.2732508

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  • Ref. 152 explored the ion momentum loss to the lateral wall and showed that it is enhanced due to the depletion of the neutral gas.

    “Ref. 152 explored the ion momentum loss to the lateral wall and showed that it is enhanced due to the depletion of the neutral gas.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [152]

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Metadata

Authors
Álvarez, R., & Alves, L. L.
Affiliations
Instituto Superior Técnico (PT)
ORCID
Venue
Journal of Applied Physics
Publisher
AIP Publishing
Published
2007-05-15
Volume
101
Issue
10
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
DOI
10.1063/1.2732508
OpenAlex
W2012561461
Cited by
21
References
0
Citations by year
2025: 1 · 2023: 2 · 2021: 3 · 2016: 1 · 2015: 4 · 2014: 1 · 2012: 1
FWCI
2.21
Type
journal article
Language
en
Open access
closed
Locations
Journal of Applied Physics (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Atmospheric-Pressure Plasma Applications
  • Physical Sciences › Chemistry › Organic Chemistry › Microwave-Assisted Synthesis and Applications
Keywords
microwave plasma reactor, 2.45 GHz, coaxial waveguide, electromagnetic field distribution, power absorption, evanescent modes, circular waveguide, plasma density profile, device optimization

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