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Cited by 275

The DOI matches its Crossref record; 30 of the 30 references it cites were found in a registry or an index.

Cathodoluminescence scanning electron microscopy of semiconductors

Yacobi, B. G., Holt, D. B.·1986·Journal of Applied Physics

Abstract

This paper reviews applications of cathodoluminescence scanning electron microscopy in the assessment of optical and electronic properties of semiconductors. The assessment includes, for example, information on band structure and impurity levels derived from spectroscopic cathodoluminescence, analysis of dopant concentrations at a level which is in some cases several orders of magnitude better than x-ray microanalysis, and mapping of carrier lifetimes and defects. Recent advances in both the various cathodoluminescence techniques and the processes leading to electron-beam-induced luminescence in semiconductors are reviewed. Possible future trends are also discussed.

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Crossref · 10.1063/1.336491

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Metadata

Authors
Yacobi, B. G., & Holt, D. B.
Venue
Journal of Applied Physics
Published
1986-02-15
Volume
59
Issue
4
Pages
R1-R24
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W2071349256
Cited by
275
References
30
FWCI
5.30
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Cathodoluminescence scanning electron microscopy of semiconductors. https://app.cochat.ai/papers/10.1063/1.336491
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Yacobi, B. G., & Holt, D. B. (1986). Cathodoluminescence scanning electron microscopy of semiconductors. Journal of Applied Physics. https://doi.org/10.1063/1.336491

Data sources

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.