The DOI matches its Crossref record; 9 of the 9 references it cites were found in a registry or an index.
Electromagnetic particle simulation of electron cyclotron resonance microwave discharge
Abstract
We present a numerical model to study the electron cyclotron resonance (ECR) microwave discharge using a one-dimensional electromagnetic particle-in-cell Monte Carlo collision method [C. K. Birdsall, IEEE Trans. Plasma Sci. 19, 65 (1991)]. In our model, the electromagnetic wave is polarized circularly and propagates along an external static magnetic field and elastic, excitational, and ionizing electron-neutral collisions and elastic and charge exchange ion-neutral collisions are included. The discharge for helium gas is simulated and the simulation results explain well the physical properties of the ECR discharge which include the energy absorption of electrons through ECR coupling, the propagation of microwave, the transports of the charged particles, and the effect of divergent external magnetic field.
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“Another set of works 26,116,156-160 studied numerically ECR discharges with a grid extraction system. They used the aforementioned simplified approach, where the MW fields were calculated from Eqs. (10) and (11), but without taking into account the plasma contribution, i.e., with j = 0.”
From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [160]
Citations
Cites
Birdsall, C. K. (1991) · IEEE Transactions on Plasma Science · doi:10.1109/27.106800 · Cited by 1,363
Electron cyclotron resonance microwave discharges for etching and thin-film deposition
Asmussen, J. (1989) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.575815 · Cited by 380
Time-reversible difference procedures
Buneman, O. (1967) · Journal of Computational Physics · doi:10.1016/0021-9991(67)90056-3 · Cited by 138
Elastic and Inelastic Scattering of Low-Velocity He+ Ions in Helium
Cramer, W. H., & Simons, J. H. (1957) · The Journal of Chemical Physics · doi:10.1063/1.1743506 · Cited by 82
Modeling and simulation of magnetically confined low-pressure plasmas in two dimensions
Porteous, R. K., & Graves, D. B. (1991) · IEEE Transactions on Plasma Science · doi:10.1109/27.106815 · Cited by 66
Particle simulation of bounded 1D plasma systems
Lawson, W. S. (1989) · Journal of Computational Physics · doi:10.1016/0021-9991(89)90099-5 · Cited by 66
Electron energy distributions in electron cyclotron resonance discharges for materials processing
Weng, Y., & Kushner, M. J. (1992) · Journal of Applied Physics · doi:10.1063/1.352144 · Cited by 53
Modeling of plasma flow downstream of an electron cyclotron resonance plasma source
Hussein, M. A., & Emmert, G. A. (1990) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.576649 · Cited by 38
On the analysis of an ECR plasma
Chang, H., Song, S.-K., & Kim, Y. J. (1990) · Physics Letters A · doi:10.1016/0375-9601(90)90544-x · Cited by 4
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Plasma propulsion modeling with particle-based algorithms
Taccogna, F., Cichocki, F., Eremin, D., Fubiani, G., & Garrigues, L. (2023) · Journal of Applied Physics · doi:10.1063/5.0153862 · Cited by 29
Metadata
- Authors
- Koh, W. H., Choi, N. H., Choi, D. I., & Oh, Y. H.
- Affiliations
- Korea Advanced Institute of Science and Technology (KR)
- Electronics and Telecommunications Research Institute (KR)
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 1993-05-01
- Volume
- 73
- Issue
- 9
- Pages
- 4205-4211
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2029192768
- Cited by
- 19
- References
- 9
- Citations by year
- 2025: 1 · 2024: 1 · 2023: 2 · 2021: 1 · 2013: 1
- FWCI
- 1.98
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Applied Physics (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
- Physical Sciences › Physics and Astronomy › Nuclear and High Energy Physics › Magnetic confinement fusion research
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
- Keywords
- electron cyclotron resonance discharge, microwave discharge, electromagnetic particle-in-cell simulation, circularly polarized microwaves, electron-neutral collisions, ion-neutral collisions, charge exchange, helium plasma, microwave propagation, particle transport
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