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Thermal conductivity anisotropy and grain structure in Ge2Sb2Te5 films

Lee, Jaeho, Li, Zijian, Reifenberg, John P., Lee, Sangchul, Sinclair, Robert, Asheghi, Mehdi, Goodson, Kenneth E.·2011·Journal of Applied Physics

Abstract

Although lateral thermal conduction in Ge2Sb2Te5 (GST) films can influence the performance of phase change memory (PCM), there are no data available for the in-plane thermal conductivity. This work measures both the in-plane and the out-of-plane thermal conductivities for the amorphous, face-centered-cubic, and hexagonal-close-packed phases of GST using two independent techniques. For crystalline GST, we report anisotropy favoring out-of-plane conduction by up to 54%, which varies with annealing time. Scaling arguments indicate that the anisotropy may be due to the thermal resistance of amorphous regions near grain boundaries. This explanation is consistent with transmission electron microscopy images showing columnar grains and amorphous phase at grain boundaries.

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Crossref · 10.1063/1.3573505

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  • To increase measurement accuracy, it is desirable that the product of thin film in-plane thermal conductivity and film thickness be equal to or greater than the corresponding product of the substrate.

    “In order to increase measurement accuracy, Volklein et al. [74] concluded that it is desirable to have the product of the thin film in-plane thermal conductivity 𝑘 𝑓,∥ and film thickness 𝑑 𝑓 equal to or greater than the corresponding product of the substrate (i.e.𝑘 𝑓,∥ 𝑑 𝑓 ≥ 𝑘 𝑆 𝑑 𝑆 ).”

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Metadata

Authors
Lee, J., Li, Z., Reifenberg, J. P., Lee, S., Sinclair, R., Asheghi, M., & Goodson, K. E.
Affiliations
  • Department of Mechanical Engineering, Stanford University 1 , Stanford, California 94305, USA
  • Stanford University 2 Department of Material Science Engineering, , Stanford, California 94305, USA
Venue
Journal of Applied Physics
Published
2011-04-15
Volume
109
Issue
8
ISSN
  • 0021-8979
  • 1089-7550
Cited by
85
References
2
Language
en
Funders
National Science Foundation (CBET-0853350)

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