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Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering
Open accessAbstract
The fundamental question of how energy is supplied to a magnetron discharge is commonly answered by the Penning-Thornton paradigm invoking secondary electrons. Recently, Huo and coworkers (Plasma Sources Sci. Technol. 22, 045005 (2013)) used a global discharge model to show that electron heating in the electric field of the magnetic presheath is dominant over heating by secondary electrons. In this contribution, this concept is applied locally taking into account the electric potential structure of ionization zones. Images of ionization zones can and should be interpreted as diagrams of the localization of high electric potential and related electron energy.
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Non-linear effects such as the generation of higher harmonics, parametric decay instabilities, non-linear wave-particle interaction including particle trapping effects, and non-linear skin-effect can be important but require evolving the EM fields in the time domain.
“Non-linear effects, such as the generation of higher harmonics, parametric decay instabilities, non-linear wave-particle interaction including particle trapping effects, non-linear skin-effect (see, e.g., Refs.131-136) can be important but require evolving the EM fields in the time domain.”
From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [134]
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Plasma propulsion modeling with particle-based algorithms
Taccogna, F., Cichocki, F., Eremin, D., Fubiani, G., & Garrigues, L. (2023) · Journal of Applied Physics · doi:10.1063/5.0153862 · Cited by 29
Metadata
- Authors
- Anders, A.
- Affiliations
- Lawrence Berkeley National Laboratory (US)
- Corresponding author
- Anders, André
- ORCID
- Anders, André
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2014-12-15
- Volume
- 105
- Issue
- 24
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2040285553
- Cited by
- 55
- References
- 0
- Citations by year
- 2024: 3 · 2023: 7 · 2022: 4 · 2021: 3 · 2020: 3 · 2019: 8 · 2018: 4 · 2017: 10 · 2016: 7 · 2015: 5 · 2014: 1
- FWCI
- 4.07
- Type
- journal article
- Language
- en
- Open access
- green
- www.osti.gov
- Locations
- Applied Physics Letters (publishedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- eScholarship (California Digital Library) (submittedVersion)
- Funders
- U.S. Department of Energy (DE-AC02-05CH11231)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
- Physical Sciences › Materials Science › Materials Chemistry › Fusion materials and technologies
- Keywords
- magnetron sputtering, electron heating, ionization region, secondary electrons
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