Cited by 11Low-Pressure Plasma Processing and DiagnosticsVacuum and Plasma ArcsElectron and X-Ray Spectroscopy Techniques

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Plasma sheath material induced dependence due to secondary electron emission

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Abstract

Plasma sheaths in front of six different material samples (BN, BNSiO2, Al2O3, SiO2, stainless steel, and silicon) used in various experiments and devices (Hall thrusters, plasma discharge, and microelectronics) are studied using the laser induced fluorescence diagnostic. The specific secondary electron emission (SEE) yield of each material is expected to induce differences in the sheath structure from one sample to another. The experiments are carried out in two different plasma discharges (multipolar device and ECR device), exhibiting distinct electron distribution functions: bi-Maxwellian and Maxwellian. The agreement between the two experiments is good and allows us to classify the materials in a consistent way regarding their SEE yields. The multipolar experiment results are compared to a 1D kinetic sheath model and a 1D-1 V kinetic sheath simulation code. The predictions of the model are discussed and are in good agreement with previous theory. The influence of the low energy impinging electrons on the SEE yield and emissive sheaths is investigated with the code.

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Crossref · 10.1063/1.5141348

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  • A polytropic electron model based on a single coefficient γ cannot capture correctly the kinetic physics of unmagnetized plasma plume expansions and introduces errors even in macroscopic quantities such as the electric potential and the ion density, especially in the plume peripheral and backflow regions.

    “It is therefore not surprising that a polytropic electron model based on a single coefficient γ cannot capture correctly the above physics and introduces errors even in macroscopic quantities such as the electric potential and the ion density, especially in the plume peripheral and backflow regions.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [244]

  • Recent full PIC studies observed a clear anisotropy in the electron parallel and perpendicular temperatures of a planar plume expansion.

    “Recent full PIC studies 243-245 , also observed a clear anisotropy in the electron parallel and perpendicular temperatures of a planar plume expansion.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [244]

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Metadata

Authors
Pigeon, V., Claire, N., Arnas, C., Terasaka, K., & Inagaki, S.
Affiliations
  • Centre National de la Recherche Scientifique (FR)
  • Kyushu University (JP)
  • Research Institute for Applied Mechanics, Kyushu University (JP)
Corresponding author
Pigeon, V.
Venue
Physics of Plasmas
Published
2020-04-01
Volume
27
Issue
4
Pages
043505
ISSN
  • 1070-664X (ISSN-L)
  • 1089-7674
OpenAlex
W3014953046
Cited by
11
References
0
Citations by year
2024: 1 · 2023: 3 · 2022: 3 · 2021: 2 · 2020: 2
FWCI
0.86
Type
journal article
Language
en
Open access
Licence
other-oa
Locations
  • Physics of Plasmas (publishedVersion)
  • HAL (submittedVersion, other-oa)
Funders
  • Japan Society for the Promotion of Science (SP18216)
  • National Institute for Fusion Science (NIFS18KNWP007)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
  • Physical Sciences › Materials Science › Surfaces, Coatings and Films › Electron and X-Ray Spectroscopy Techniques
Keywords
plasma sheath, secondary electron emission, laser-induced fluorescence, Hall thruster, boron nitride, silicon, stainless steel, electron distribution function

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