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Scanning thermal profiler
Abstract
A new high-resolution profilometer has been demonstrated based upon a noncontacting near-field thermal probe. The thermal probe consists of a thermocouple sensor with dimensions approaching 100 nm. Profiling is achieved by scanning the heated sensor above but close to the surface of a solid. The conduction of heat between tip and sample via the air provides a means for maintaining the sample spacing constant during the lateral scan. The large difference in thermal properties between air and solids makes the profiling technique essentially independent of the material properties of the solid. Noncontact profiling of resist and metal films has shown a lateral resolution of 100 nm and a depth solution of 3 nm. The basic theory of the new probe is described and the results presented.
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Citations
Cited by
Cahill, D. G., Ford, W. K., Goodson, K. E., Mahan, G. D., Majumdar, A., Maris, H. J., Merlin, R., & Phillpot, S. R. (2003) · Journal of Applied Physics · doi:10.1063/1.1524305 · Cited by 2,825
Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures
Cahill, D. G., Goodson, K., & Majumdar, A. (2002) · Journal of Heat Transfer · doi:10.1115/1.1454111 · Cited by 611
Thermal imaging using the atomic force microscope
Majumdar, A., Carrejo, J. P., & Lai, J. (1993) · Applied Physics Letters · doi:10.1063/1.109335 · Cited by 254
Phonon thermal conduction in novel 2D materials
Xu, X., Chen, J., & Li, B. (2016) · Journal of Physics: Condensed Matter · doi:10.1088/0953-8984/28/48/483001 · Cited by 137
Metadata
- Authors
- Williams, C. C., & Wickramasinghe, H. K.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1986-12-08
- Volume
- 49
- Issue
- 23
- Pages
- 1587-1589
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2057567599
- Cited by
- 413
- References
- 0
- FWCI
- 17.30
- Type
- journal article
- Language
- en
- Open access
- closed
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- Williams, C. C., & Wickramasinghe, H. K. (1986). Scanning thermal profiler. Applied Physics Letters. https://doi.org/10.1063/1.97288
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
