Thermally tunable microring resonators based on germanium-on-insulator for mid-infrared spectrometer

Abstract

We present a thermally tunable microring resonator (MRR) implemented on a Ge-on-insulator (Ge-OI) photonic platform tailored for mid-infrared spectrometer applications. Thanks to the favorable thermo-optic effect of Ge, we characterized the optical and thermal properties of the thermally tunable Ge-OI MRR through rigorous optical and thermal numerical analyses. Building upon the simulation, a ring-shaped Au heater was successfully integrated into the Ge-OI MRR that was fabricated by using a direct wafer bonding process, followed by electron-beam lithography and dry etching techniques. Observations via thermo-reflectance microscopy revealed the temperature change within the Ge induced by heat transfer from the applied bias to the Au heater. Notably, the measured temperature change of 17 K at an applied electrical power of 181.7 mW closely aligned with the simulated values. In optical measurement, the heater-integrated Ge-OI MRR exhibited the tunability of 33.7 nm/W (0.36 nm/K) and the loaded Q factor of 21k at 4.2 µm wavelength with no bias. Hence, our demonstration of the Ge-OI tunable ring filter for mid-IR spectrometers could be a promising technology employing photonic integrated circuits for diverse applications in optical communication and spectral sensing.