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Cited by 171

The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.

The use of high aspect ratio photoresist (SU-8) for super-hydrophobic pattern prototyping

Open access
Shirtcliffe, Neil J, Aqil, Sanaa, Evans, Carl, McHale, Glen, Newton, Michael I, Perry, Carole C, Roach, Paul·2004·Journal of Micromechanics and Microengineering

Abstract

In this work we present a reliable technique for the production of large areas of high aspect-ratio patterns and describe their use as model super-hydrophobic systems. The high thickness and straight sidewalls possible with SU-8 were used to generate dense patterns of small pillars. These photoresist patterns could be used directly, without the need for micromoulding. A method is given allowing resist thickness to be varied over a wide range and a bottom antireflective layer was used to simplify patterning on reflective substrates. This patterning technique allows rapid testing of wetting theories, as pattern size and depth can be varied simply and samples can be produced in sufficient numbers for laboratory use. We show how the static contact angle of water varies with pattern height for one sample-pattern and how static and dynamic contact angles vary with dimension using high aspect-ratio patterns.

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Crossref · 10.1088/0960-1317/14/10/013

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Metadata

Authors
Shirtcliffe, N. J., Aqil, S., Evans, C., McHale, G., Newton, M. I., Perry, C. C., & Roach, P.
Venue
Journal of Micromechanics and Microengineering
Published
2004-07-14
Volume
14
Issue
10
Pages
1384-1389
ISSN
  • 0960-1317 (ISSN-L)
  • 1361-6439
OpenAlex
W1972811863
Cited by
171
References
2
FWCI
5.17
Type
journal article
Language
en
Open access
bronze

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The paper
Shirtcliffe, N. J., Aqil, S., Evans, C., McHale, G., Newton, M. I., Perry, C. C., & Roach, P. (2004). The use of high aspect ratio photoresist (SU-8) for super-hydrophobic pattern prototyping. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/14/10/013

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

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