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Mechanical properties of silicones for MEMS
Open accessAbstract
This paper focuses on the mechanical properties of polydimethylsiloxane (PDMS) relevant for microelectromechanical system (MEMS) applications. In view of the limited amount of published data, we analyzed the two products most commonly used in MEMS, namely RTV 615 from Bayer Silicones and Sylgard 184 from Dow Corning. With regard to mechanical properties, we focused on the dependence of the elastic modulus on the thinner concentration, temperature and strain rate. In addition, creep and thermal aging were analyzed. We conclude that the isotropic and constant elastic modulus has strong dependence on the hardening conditions. At high hardening temperatures and long hardening time, RTV 615 displays an elastic modulus of 1.91 MPa and Sylgard 184 of 2.60 MPa in a range up to 40% strain.
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Cited by
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Jeong, S. H., Zhang, S., Hjort, K., Hilborn, J., & Wu, Z. (2016) · Advanced Materials · doi:10.1002/adma.201505372 · Cited by 363
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3D printed anatomical nerve regeneration pathways
Johnson, B. N., Lancaster, K. Z., Zhen, G., He, J., Gupta, M. K., Kong, Y. L., Engel, E. A., Krick, K. D., Ju, A., Meng, F., et al. (2015) · Advanced Functional Materials · doi:10.1002/adfm.201501760 · Cited by 293
How to tailor flexible silicone elastomers with mechanical integrity: a tutorial review
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Metadata
- Authors
- Schneider, F., Fellner, T., Wilde, J., & Wallrabe, U.
- Venue
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Published
- 2008-04-29
- Volume
- 18
- Issue
- 6
- Pages
- 065008
- ISSN
- 0960-1317 (ISSN-L)
- 1361-6439
- OpenAlex
- W2091631730
- Cited by
- 435
- References
- 0
- FWCI
- 17.63
- Type
- journal article
- Language
- en
- Open access
- bronze
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- Schneider, F., Fellner, T., Wilde, J., & Wallrabe, U. (2008). Mechanical properties of silicones for MEMS. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/18/6/065008
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