Cited by 72Low-Pressure Plasma Processing and DiagnosticsElectron and X-Ray Spectroscopy TechniquesVacuum and Plasma Arcs

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The ion- and atom-induced secondary electron emission yield: numerical study for the effect of clean and dirty cathode surfaces

Bogaerts, Annemie, Gijbels, Renaat·2002·Plasma Sources Science and Technology

Abstract

The effect of the ion- and atom-induced secondary electron emission yields for both `clean' and `dirty' cathode surfaces is investigated by means of a hybrid model, for typical conditions used in analytical direct current glow discharges (i.e. a pressure of 50-100 Pa, a voltage of 600-1200 V, and an electrical current of 1-10 mA). The hybrid model consists of a number of Monte Carlo models for fast electrons, fast argon ions and atoms in the cathode dark space, and sputtered copper atoms, a fluid model for slow electrons and argon ions, and a heat transfer model to calculate the gas temperature. For clean surfaces, secondary electron emission is almost exclusively attributed to argon ions, at the conditions under study. For dirty surfaces, on the other hand, fast argon ions and atoms contribute each about 50% to secondary electron emission, at the same discharge conditions. A so-called `apparent' secondary electron emission yield (i.e. per bombarding ion) is determined for the range of conditions under study. This value for clean surfaces was found equal to 0.07 for argon on a copper cathode, at all conditions investigated; for dirty surfaces, this value was always higher than 0.07 and it strongly depends on the discharge conditions. With these data, current-voltage-pressure characteristics have been calculated for both clean and dirty surfaces, and compared to experimental data. The absolute current values differ by a factor of 1-1.6 between clean and dirty surfaces. However…

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Research works printed but not linked: 22

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Metadata

Authors
Bogaerts, A., & Gijbels, R.
Venue
Plasma Sources Science and Technology
Published
2002-01-09
Volume
11
Issue
1
Pages
27-36
ISSN
  • 0963-0252 (ISSN-L)
  • 1361-6595
OpenAlex
W2008490556
Cited by
72
References
0
Citations by year
2026: 2 · 2025: 2 · 2024: 3 · 2023: 5 · 2022: 6 · 2021: 2 · 2020: 1 · 2019: 2 · 2018: 4 · 2017: 5 · 2016: 3 · 2015: 6 · 2014: 3 · 2013: 3 · 2012: 5
FWCI
3.50
Type
journal article
Language
en
Open access
closed
Locations
Plasma Sources Science and Technology (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Materials Science › Surfaces, Coatings and Films › Electron and X-Ray Spectroscopy Techniques
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
Keywords
secondary electron yield, argon ions, argon atoms, copper cathode, DC glow discharge

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Bogaerts, A., & Gijbels, R. (2002). The ion- and atom-induced secondary electron emission yield: numerical study for the effect of clean and dirty cathode surfaces. Plasma Sources Science and Technology. https://doi.org/10.1088/0963-0252/11/1/303