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Qubit compatible superconducting interconnects
Open accessAbstract
We present a fabrication process for fully superconducting interconnects compatible with superconducting qubit technology. These interconnects allow for the three dimensional integration of quantum circuits without introducing lossy amorphous dielectrics. They are composed of indium bumps several microns tall separated from an aluminum base layer by titanium nitride which serves as a diffusion barrier. We measure the whole structure to be superconducting (transition temperature of 1.1 K), limited by the aluminum. These interconnects have an average critical current of 26.8 mA, and mechanical shear and thermal cycle testing indicate that these devices are mechanically robust. Our process provides a method that reliably yields superconducting interconnects suitable for use with superconducting qubits.
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“Our results provide a natural explanation for the observations of short periods of signi cantly elevated error found in recent experiments with stabilizer codes [23, 24].”
From Resolving catastrophic error bursts from cosmic rays in large arrays of superconducting qubits (2022) · cites this paper as [23]
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“which is much larger than the typical QEC round time of 1 s [23, 24].”
From Resolving catastrophic error bursts from cosmic rays in large arrays of superconducting qubits (2022) · cites this paper as [23]
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Surface codes: Towards practical large-scale quantum computation
Fowler, A. G., Mariantoni, M., Martinis, J. M., & Cleland, A. N. (2012) · Physical Review A · doi:10.1103/physreva.86.032324 · Cited by 3,059
Self-citationSuperconducting quantum circuits at the surface code threshold for fault tolerance
Barends, R., Kelly, J., Megrant, A., Veitia, A., Sank, D., Jeffrey, E., White, T. C., Mutus, J., Fowler, A. G., Campbell, B., et al. (2014) · Nature · doi:10.1038/nature13171 · Cited by 1,733
Self-citationCoherent Josephson Qubit Suitable for Scalable Quantum Integrated Circuits
Barends, R., Kelly, J., Megrant, A., Sank, D., Jeffrey, E., Chen, Y., Yin, Y., Chiaro, B., Mutus, J., Neill, C., et al. (2013) · Physical Review Letters · doi:10.1103/physrevlett.111.080502 · Cited by 779
Self-citationCorcoles, A. D., Magesan, E., Srinivasan, S. J., Cross, A. W., Steffen, M., Gambetta, J., & Chow, J. M. (2015) · Nature Communications · doi:10.1038/ncomms7979 · Cited by 495
3D integrated superconducting qubits
Rosenberg, D., Kim, D. K., Das, R. N., Yost, D., Gustavsson, S., Hover, D. J., Krantz, P., Melville, A. J., Racz, L. M., Samach, G., et al. (2017) · npj Quantum Information · doi:10.1038/s41534-017-0044-0 · Cited by 298
Microwave dielectric loss at single photon energies and millikelvin temperatures
O’Connell, A. D., Ansmann, M., Bialczak, R. C., Hofheinz, M., Katz, N., Lucero, E., McKenney, C., Neeley, M., Wang, H., Weig, E. M., et al. (2008) · Applied Physics Letters · doi:10.1063/1.2898887 · Cited by 274
Self-citationImproved superconducting qubit coherence using titanium nitride
Chang, J. B., Vissers, M. R., Córcoles, A. D., Sandberg, M., Gao, J., Abraham, D. W., Chow, J. M., Gambetta, J. M., Rothwell, M. B., Keefe, G. A., et al. (2013) · Applied Physics Letters · doi:10.1063/1.4813269 · Cited by 265
Detecting bit-flip errors in a logical qubit using stabilizer measurements
Ristè, D., Poletto, S., Huang, M.-Z., Bruno, A., Vesterinen, V., Saira, O.-P., & DiCarlo, L. (2015) · Nature Communications · doi:10.1038/ncomms7983 · Cited by 254
Demonstration of Weight-Four Parity Measurements in the Surface Code Architecture
Takita, M., Corcoles, A. D., Magesan, E., Abdo, B., Brink, M., Cross, A. W., Chow, J. M., & Gambetta, J. (2016) · Physical Review Letters · doi:10.1103/physrevlett.117.210505 · Cited by 198
Experimental demonstration of a robust and scalable flux qubit
Harris, R., Johansson, J., Berkley, A. J., Johnson, M. W., Lanting, T., Han, S., Bunyk, P., Ladizinsky, E., Oh, T., Perminov, I., et al. (2010) · Physical Review B · doi:10.1103/physrevb.81.134510 · Cited by 177
Dunsworth, A., Megrant, A., Quintana, C., Chen, Z., Barends, R., Burkett, B., Foxen, B., Chen, Y., Chiaro, B., Fowler, A. G., et al. (2017) · Applied Physics Letters · doi:10.1063/1.4993577 · Cited by 130
Self-citationRoom temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators
Ohya, S., Chiaro, B., Megrant, A., Neill, C., Barends, R., Chen, Y., Kelly, J., Low, D., Mutus, J., O’Malley, P. J. J., et al. (2013) · Superconductor Science and Technology · doi:10.1088/0953-2048/27/1/015009 · Cited by 94
Self-citationFabrication of stable and reproducible submicron tunnel junctions
Pop, I. M., Fournier, T., Crozes, T., Lecocq, F., Matei, I., Pannetier, B., Buisson, O., & Guichard, W. (2012) · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · doi:10.1116/1.3673790 · Cited by 89
Development of an Indium bump bond process for silicon pixel detectors at PSI
Broennimann, C., Glaus, F., Gobrecht, J., Heising, S., Horisberger, M., Horisberger, R., Kaestli, H. C., Lehmann, J., Rohe, T., & Streuli, S. (2006) · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · doi:10.1016/j.nima.2006.05.011 · Cited by 82
Frear, D. R., Datta, M., Kohl, P. A., Ōsaka, T., Schultze, J. W., Krongelb, S., OKINAKA, Y., Watts, D., Akahoshi, H., Butterbaugh, J. W., et al. (2004) · CRC Press eBooks · doi:10.1201/9780203473689 · Cited by 49
Design and testing of high-speed interconnects for superconducting multi-chip modules
Narayana, S., Semenov, V. K., Polyakov, Y. A., Dotsenko, V., & Tolpygo, S. K. (2012) · Superconductor Science and Technology · doi:10.1088/0953-2048/25/10/105012 · Cited by 31
Superconducting TiN Films Sputtered Over a Large Range of Substrate DC Bias
Jaim, H. M. I., Aguilar, J. A., Sarabi, B., Rosen, Y. J., Ramanayaka, A. N., Lock, E. H., Richardson, C. J. K., & Osborn, K. D. (2014) · IEEE Transactions on Applied Superconductivity · doi:10.1109/tasc.2014.2366036 · Cited by 30
Design and fabrication of the detector technology for SCUBA-2
Walton, A. J., Parkes, W. J., Terry, J. G., Dunare, C. C., Stevenson, J. T. M., Gundlach, A. M., Hilton, G. C., Irwin, K. D., Ullom, J. N., Holland, W. S., et al. (2004) · IEE Proceedings - Science Measurement and Technology · doi:10.1049/ip-smt:20040088 · Cited by 15
Thermocompression bonding technology for multilayer superconducting quantum circuits
McRae, C. R., Béjanin, J. H., Pagel, Z., Abdallah, A. O., McConkey, T., Earnest, C. T., Rinehart, J. R., & Mariantoni, M. (2017) · Applied Physics Letters · doi:10.1063/1.5003169 · Cited by 12
Tolpygo, S. K., Tolpygo, D., Hunt, R. T., Narayana, S., Polyakov, Y. A., & Semenov, V. K. (2009) · IEEE Transactions on Applied Superconductivity · doi:10.1109/tasc.2009.2017858 · Cited by 11
Characterization of a novel fluxless surface preparation process for die interconnect bonding
Schulte, E. F., Cooper, K. A., Phillips, M. R., & Shindé, S. L. (2012) · IEEE Electronic Components and Technology Conference (ECTC) · doi:10.1109/ectc.2012.6248801 · Cited by 8
Fabrication of prototype imaging arrays for SCUBA-2
Hilton, G. C., Beall, J. A., Doriese, W. B., Duncan, W., Ferreira, L., Irwin, K. D., Reintsema, C. D., Ullom, J. N., Vale, L. R., Xu, Y., et al. (2006) · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · doi:10.1016/j.nima.2005.12.042 · Cited by 4
Flagged first, then by citations
Research works printed but not linked: 2
- McRae C R H, 2017, 111, 12
- Wade K, 1973, The Chemistry of Aluminium, Gallium, Indium and Thallium
Cited by
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A quantum engineer's guide to superconducting qubits
Krantz, P., Kjærgaard, M., Yan, F., Orlando, T. P., Gustavsson, S., & Oliver, W. D. (2019) · Applied Physics Reviews · doi:10.1063/1.5089550 · Cited by 2,321
Strong Quantum Computational Advantage Using a Superconducting Quantum Processor
Wu, Y., Bao, W.-S., Cao, S., Chen, F., Chen, M.-C., Chen, X., Chung, T.-H., Deng, H., Du, Y., Fan, D., et al. (2021) · Physical Review Letters · doi:10.1103/physrevlett.127.180501 · Cited by 1,059
Self-citation3D integrated superconducting qubits
Rosenberg, D., Kim, D. K., Das, R. N., Yost, D., Gustavsson, S., Hover, D. J., Krantz, P., Melville, A. J., Racz, L. M., Samach, G., et al. (2017) · npj Quantum Information · doi:10.1038/s41534-017-0044-0 · Cited by 298
Materials loss measurements using superconducting microwave resonators
McRae, C. R. H., Wang, H., Gao, J., Vissers, M. R., Brecht, T., Dunsworth, A., Pappas, D. P., & Mutus, J. (2020) · Review of Scientific Instruments · doi:10.1063/5.0017378 · Cited by 283
Self-citationMagnard, P., Storz, S., Kurpiers, P., Schär, J., Marxer, F., Lütolf, J., Walter, T., Besse, J.-C., Gabureac, M. S., Reuer, K., et al. (2020) · Physical Review Letters · doi:10.1103/physrevlett.125.260502 · Cited by 266
Metadata
- Authors
- Foxen, B., Mutus, J. Y., Lucero, E., Graff, R., Megrant, A., Chen, Y., Quintana, C., Burkett, B., Kelly, J., Jeffrey, E., Yang, Y., Yu, A., Arya, K., Barends, R., Chen, Z., Chiaro, B., Dunsworth, A., Fowler, A., Gidney, C., Giustina, M., Huang, T., Klimov, P., Neeley, M., Neill, C., Roushan, P., Sank, D., Vainsencher, A., Wenner, J., White, T. C., & Martinis, J. M.
- Affiliations
- University of California, Santa Barbara (US)
- Google (United States) (US)
- Corresponding author
- Martinis, John M
- ORCID
- Venue
- Quantum Science and Technology
- Publisher
- IOP Publishing
- Published
- 2017-11-29
- Volume
- 3
- Issue
- 1
- Pages
- 014005
- ISSN
- 2058-9565 (ISSN-L)
- OpenAlex
- W2748822299
- Cited by
- 143
- References
- 22
- Citations by year
- 2026: 8 · 2025: 10 · 2024: 27 · 2023: 22 · 2022: 17 · 2021: 21 · 2020: 14 · 2019: 10 · 2018: 11 · 2017: 3
- FWCI
- 5.69
- Type
- journal article
- Language
- en
- Open access
- hybrid
- doi.org
- Licence
- Locations
- Quantum Science and Technology (publishedVersion, cc-by)
- arXiv (Cornell University) (submittedVersion)
- arXiv (Cornell University)
- Funders
- Division of Graduate Education (DGE- 1144085)
- Google (JMGI01)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Superconducting and THz Device Technology
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Quantum Information and Cryptography
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Superconducting Materials and Applications
- Keywords
- superconducting interconnects, superconducting qubits, indium bumps, critical current, mechanical robustness, thermal cycling, fabrication techniques
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