Efficient Extreme Ultraviolet Mirror Design: An FDTD approach
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During 2000-11, he was academic administrator, being vice chancellor to a couple of
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Reflective components with efficiency up to ~70% are routinely achieved owing to multilayer coatings.
“Owing to multilayer coatings, reflective components with efficiency up to ~70% are routinely achieved 20-22 .”
From Extreme ultraviolet lithography (2024) · cites this paper as [21]
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Extreme ultraviolet lithography
Kazazis, D., Santaclara, J. G., van Schoot, J., Mochi, I., & Ekinci, Y. (2024) · Nature Reviews Methods Primers · doi:10.1038/s43586-024-00361-z · Cited by 149 · see citing works
- Authors
- Lee, Y.-M.
- Affiliations
- ASML Holding
- Corresponding author
- Lee, Yen-Min
- Venue
- Institute of Physics eBooks
- Publisher
- IOP Publishing
- Published
- 2021-09
- OpenAlex
- W3198039628
- Cited by
- 3
- References
- 0
- Citations by year
- 2024: 1 · 2022: 1 · 2021: 1
- FWCI
- 1.93
- Type
- book
- Language
- en
- Open access
- bronze
- doi.org
- Locations
- Institute of Physics eBooks (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Photolithography Techniques
- Physical Sciences › Physics and Astronomy › Radiation › Advanced X-ray Imaging Techniques
- Keywords
- extreme ultraviolet mirrors, mirror design, optical design optimization
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