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Structural, Optical, and Electrical Properties of Amorphous Silicon Films
Abstract
We report measurements on the x-ray diffraction, electron spin resonance (ESR), optical absorption, and electrical conductivity of amorphous Si films. The x-ray diffraction results show there is no long-range ordering of the atoms in amorphous Si independent of the sample's thermal history, while all of the other properties show strong dependences on annealing. The ESR results indicate a large number of microscopic surfaces distributed throughout the amorphous bulk, and lead us to interpret the optical and electrical properties in terms of "building blocks" with linear dimensions between 10 and 15 \AA{}.
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Cited by
Refractive index of silicon and germanium and its wavelength and temperature derivatives
Li, H. H. (1980) · Journal of Physical and Chemical Reference Data · doi:10.1063/1.555624 · Cited by 863
Optical Properties of Amorphous Semiconductors
Tauc, J. (1974) · Amorphous and Liquid Semiconductors · doi:10.1007/978-1-4615-8705-7_4 · Cited by 771
Optical dispersion relations for amorphous semiconductors and amorphous dielectrics
Forouhi, A. R., & Bloomer, I. (1986) · Physical Review B · doi:10.1103/physrevb.34.7018 · Cited by 769
Structural relaxation and defect annihilation in pure amorphous silicon
Roorda, S., Sinke, W. C., Poate, J. M., Jacobson, D. C., Dierker, S., Dennis, B. S., Eaglesham, D. J., Spaepen, F., & Fuoss, P. (1991) · Physical Review B · doi:10.1103/physrevb.44.3702 · Cited by 408
Optical absorption measurement at 1550 nm on a highly-reflective Si/SiO 2 coating stack
Steinlechner, J., Khalaidovski, A., & Schnabel, R. (2014) · Classical and Quantum Gravity · doi:10.1088/0264-9381/31/10/105005 · Cited by 14
Metadata
- Authors
- Brodsky, M. H., Title, R. S., Weiser, K., & Pettit, G. D.
- Venue
- Physical Review B
- Publisher
- American Physical Society (APS)
- Published
- 1970-03-15
- Volume
- 1
- Issue
- 6
- Pages
- 2632-2641
- ISSN
- 0556-2805 (ISSN-L)
- OpenAlex
- W2035396550
- Cited by
- 515
- References
- 0
- FWCI
- 46.11
- Type
- journal article
- Language
- en
- Open access
- closed
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- Brodsky, M. H., Title, R. S., Weiser, K., & Pettit, G. D. (1970). Structural, Optical, and Electrical Properties of Amorphous Silicon Films. Physical Review B. https://doi.org/10.1103/physrevb.1.2632
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