Particle-in-cell plus direct simulation Monte Carlo (PIC-DSMC) approach for self-consistent plasma-gas simulations
Abstract
The particle-in-cell (PIC) and direct simulation Monte Carlo (DSMC) approaches have been combined into a PIC-DSMC model for self-consistent simulations of low-temperature collisional plasmas and the background gas. This novel approach is based on the weighting collision simulation scheme allowing for disparate number densities and time scales of different species. The applicability of the developed algorithm is illustrated by simulations of one-dimensional direct current and two-dimensional magnetron sputtering discharges in argon. An appreciable effect of the energetic discharge species on the density, temperature, and flow field of the background gas shows the importance of the coupled plasma-gas simulation for such technologies as sputtering, dry etching, plasma enhanced vapor deposition, etc.
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The production of multiply charged ions from different species at high densities increases computational time, necessitating numerical tricks.
“Moreover, the production of multiply charged ions from different species induced by the high-voltage [for example chlorine and carbon ions for polytetrafluoroethylene (PTFE) used as propellant for PPT 67 ] at very high densities leads to an obvious increase of the computational time, making it necessary to reduce the simulation cost with the usual numerical tricks cited above 66 .”
From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [66]
Numerical tricks (enlarged vacuum permittivity, reduced ion mass, thruster size scaling) are still used in many simulations to reduce computational time.
“Nevertheless, numerical tricks (e.g. enlarged vacuum permittivity and/or reduction of ion mass or thruster size scaling) are still used in many simulations to reduce the computational time (see Refs. 59-64 for E × B thrusters, and Refs. 65-67 for PATs).”
From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [66]
Cites
Birdsall, C. K. (1991) · IEEE Transactions on Plasma Science · doi:10.1109/27.106800 · Cited by 1,363 · see citing works
Vahedi, V., & Surendra, M. (1995) · Computer Physics Communications · doi:10.1016/0010-4655(94)00171-w · Cited by 1,065 · see citing works
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Tskhakaya, D., Matyash, K., Schneider, R., & Taccogna, F. (2007) · Contributions to Plasma Physics · doi:10.1002/ctpp.200710072 · Cited by 297 · see citing works
Plasma propulsion modeling with particle-based algorithms
Taccogna, F., Cichocki, F., Eremin, D., Fubiani, G., & Garrigues, L. (2023) · Journal of Applied Physics · doi:10.1063/5.0153862 · Cited by 29 · see citing works
Gueroult, R., Fubiani, G., & Garrigues, L. (2018) · Frontiers in Physics · doi:10.3389/fphy.2018.00128 · Cited by 1 · see citing works
- Authors
- Serikov, V. V., Kawamoto, S., & Nanbu, K.
- Affiliations
- Nippon Sheet Glass (Japan) (JP)
- Institute of Fluid Science, Tohoku University (JP)
- Venue
- IEEE Transactions on Plasma Science
- Published
- 1999
- Volume
- 27
- Issue
- 5
- Pages
- 1389-1398
- ISSN
- 0093-3813 (ISSN-L)
- OpenAlex
- W2149577047
- Cited by
- 103
- References
- 2
- Citations by year
- 2026: 1 · 2025: 6 · 2024: 4 · 2023: 9 · 2022: 3 · 2021: 7 · 2020: 7 · 2019: 3 · 2018: 8 · 2017: 4 · 2016: 8 · 2015: 2 · 2014: 6 · 2013: 8 · 2012: 3
- FWCI
- 2.22
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- IEEE Transactions on Plasma Science (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Plasma Diagnostics and Applications
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
- Physical Sciences › Mathematics › Applied Mathematics › Gas Dynamics and Kinetic Theory
- Keywords
- particle-in-cell simulation, direct simulation Monte Carlo, argon plasma, plasma-gas interaction, dry etching
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