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Micromachined inertial sensors
Abstract
This paper presents a review of silicon micromachined accelerometers and gyroscopes. Following a brief introduction to their operating principles and specifications, various device structures, fabrication, technologies, device designs, packaging, and interface electronics issues, along with the present status in the commercialization of micromachined inertial sensors, are discussed. Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 10/spl times/ every two years during the past eight years. This impressive drive to higher performance, lower cost, greater functionality, higher levels of integration, and higher volume will continue as new fabrication, circuit, and packaging techniques are developed to meet the ever increasing demand for inertial sensors.
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Cited by
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Massaroni, C., Nicolò, A., Lo Presti, D., Sacchetti, M., Silvestri, S., & Schena, E. (2019) · Sensors · doi:10.3390/s19040908 · Cited by 426
Resonant microphotonic gyroscope
Liang, W., Ilchenko, V. S., Savchenkov, A. A., Dale, E., Eliyahu, D., Matsko, A. B., & Maleki, L. (2017) · Optica · doi:10.1364/optica.4.000114 · Cited by 207
Adaptive mode tuning for vibrational gyroscopes
Leland, R. P. (2003) · IEEE Transactions on Control Systems Technology · doi:10.1109/tcst.2003.809240 · Cited by 99
New Adaptive Mode of Operation for MEMS Gyroscopes
Park, S., & Horowitz, R. (2004) · Journal of Dynamic Systems, Measurement, and Control · doi:10.1115/1.1849252 · Cited by 52
On the Interpretation of 3D Gyroscope Measurements
Stančin, S., & Tomažič, S. (2018) · Journal of Sensors · doi:10.1155/2018/9684326 · Cited by 10
Metadata
- Authors
- Yazdi, N., Ayazi, F., & Najafi, K.
- Venue
- Proceedings of the IEEE
- Published
- 1998
- Volume
- 86
- Issue
- 8
- Pages
- 1640-1659
- ISSN
- 0018-9219 (ISSN-L)
- OpenAlex
- W2149128480
- Cited by
- 1,823
- References
- 0
- FWCI
- 29.66
- Type
- journal article
- Language
- en
- Open access
- closed
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