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Magnetically actuated, addressable microstructures
Abstract
Surface-micromachined, batch-fabricated structures that combine plated-nickel films with polysilicon mechanical flexures to produce individually addressable, magnetically activated devices have been fabricated and tested. Individual microactuator control has been achieved in two ways: (1) by actuating devices using the magnetic field generated by coils integrated around each device and (2) by using electrostatic forces to clamp selected devices to an insulated ground plane while unclamped devices are freely moved through large out-of-plane excursions by an off-chip magnetic field. The present application for these structures is as micromirrors for microphotonic systems where they can be used either for selection from an array of mirrors or else individually for switching among fiber paths.
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Cited by
Reprogrammable recovery and actuation behaviour of shape-memory polymers
Lendlein, A., & Gould, O. E. C. (2019) · Nature Reviews Materials · doi:10.1038/s41578-018-0078-8 · Cited by 723
Self-folding of polymer sheets using local light absorption
Liu, Y., Boyles, J. K., Genzer, J., & Dickey, M. D. (2012) · Soft Matter · doi:10.1039/c1sm06564e · Cited by 523
Overvelde, J. T. B., de Jong, T. A., Shevchenko, Y., Becerra, S. A., Whitesides, G. M., Weaver, J. C., Hoberman, C., & Bertoldi, K. (2016) · Nature Communications · doi:10.1038/ncomms10929 · Cited by 482
Three‐Dimensional Programmable Assembly by Untethered Magnetic Robotic Micro‐Grippers
Diller, E., & Sitti, M. (2014) · Advanced Functional Materials · doi:10.1002/adfm.201400275 · Cited by 323
Self-folding with shape memory composites
Felton, S. M., Tolley, M. T., Shin, B., Onal, C. D., Demaine, E. D., Rus, D., & Wood, R. J. (2013) · Soft Matter · doi:10.1039/c3sm51003d · Cited by 269
Metadata
- Authors
- Judy, J. W., & Muller, R. S.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 1997
- Volume
- 6
- Issue
- 3
- Pages
- 249-256
- ISSN
- 1057-7157 (ISSN-L)
- OpenAlex
- W2023061992
- Cited by
- 256
- References
- 0
- FWCI
- 6.03
- Type
- journal article
- Language
- en
- Open access
- closed
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
