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Feasibility of micro power supplies for MEMS
Abstract
Most microelectromechanical systems (MEMS) designed today use macroscopic power supplies, thereby placing limits on the functionality of MEMS in many applications. An alternative to this approach is to design MEMS with integral microscopic distributed power supplies. This paper examines the feasibility of creating micro power supplies by considering three functions common to MEMS power systems: (1) capture energy; (2) store energy; and (3) drive actuation, of these, only the capture energy function is highly dependent on the specific application. For each of the three functions, a table is presented which compares various means of performing the function. This information makes it possible to determine what design alternatives are feasible for the creation of a micro power supply for any specific application of MEMS. We use smart bearings with active surface features as an example application and develop a design for a micro power supply suitable for this work.
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Cited by
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Beeby, S. P., Tudor, M. J., & White, N. M. (2006) · Measurement Science and Technology · doi:10.1088/0957-0233/17/12/r01 · Cited by 3,008
Recycling Ambient Microwave Energy With Broad-Band Rectenna Arrays
Hagerty, J. A., Helmbrecht, F. B., McCalpin, W. H., Zane, R., & Popovic, Z. B. (2004) · IEEE Transactions on Microwave Theory and Techniques · doi:10.1109/tmtt.2004.823585 · Cited by 664
Zhu, D., & Beeby, S. (2011) · Energy Harvesting Systems · doi:10.1007/978-1-4419-7566-9_1 · Cited by 62
Metadata
- Authors
- Koeneman, P. B., Busch-Vishniac, I. J., & Wood, K. L.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 1997
- Volume
- 6
- Issue
- 4
- Pages
- 355-362
- ISSN
- 1057-7157 (ISSN-L)
- OpenAlex
- W2102234682
- Cited by
- 169
- References
- 0
- FWCI
- 4.52
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Feasibility of micro power supplies for MEMS. https://app.cochat.ai/papers/10.1109/84.650133
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- Koeneman, P. B., Busch-Vishniac, I. J., & Wood, K. L. (1997). Feasibility of micro power supplies for MEMS. Journal of Microelectromechanical Systems. https://doi.org/10.1109/84.650133
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