Cited by 3,008Innovative Energy Harvesting TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAdvanced MEMS and NEMS Technologies

Energy harvesting vibration sources for microsystems applications

Open access
Beeby, S P, Tudor, M J, White, N M·2006·Measurement Science and Technology

Abstract

This paper reviews the state-of-the art in vibration energy harvesting for wireless, self-powered microsystems. Vibration-powered generators are typically, although not exclusively, inertial spring and mass systems. The characteristic equations for inertial-based generators are presented, along with the specific damping equations that relate to the three main transduction mechanisms employed to extract energy from the system. These transduction mechanisms are: piezoelectric, electromagnetic and electrostatic. Piezoelectric generators employ active materials that generate a charge when mechanically stressed. A comprehensive review of existing piezoelectric generators is presented, including impact coupled, resonant and human-based devices. Electromagnetic generators employ electromagnetic induction arising from the relative motion between a magnetic flux gradient and a conductor. Electromagnetic generators presented in the literature are reviewed including large scale discrete devices and wafer-scale integrated versions. Electrostatic generators utilize the relative movement between electrically isolated charged capacitor plates to generate energy. The work done against the electrostatic force between the plates provides the harvested energy. Electrostatic-based generators are reviewed under the classifications of in-plane overlap varying, in-plane gap closing and out-of-plane gap closing; the Coulomb force parametric generator and electret-based generators are also covered. The coupling factor of each transduction mechanism is discussed and all the devices presented in the literature are summarized in tables classified by transduction type; conclusions are drawn as to the suitability of the various techniques.

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Crossref · 10.1088/0957-0233/17/12/r01

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  • Electromagnetic transduction can generate energy with higher power output than piezoelectric.

    “some researches show that use of electromagnetic can generate energy with higher power output [12, 13].”

    From A review of walking energy harvesting using piezoelectric materials (2017) · cites this paper as [13]

    Section 7, “Comparison of transduction mechanisms” (page not available), says the possible coupling coefficients of electromagnetic and piezoelectric generators are comparable and that their maximum power densities will be comparable. It does not present electromagnetic transduction as having higher power output than piezoelectric transduction. (LLM, conf=0.82)

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Research works printed but not linked: 12

  1. Bult K et al 1996 A distributed, wireless MEMS technology for condition based maintenance Proc. 1996 Integrated Monitoring, Diagnostics and Failure Prevention Conference, Society of Machine Failure Protection Technology (MPFT) (Mobile, AL, USA) pp 373-80
  2. IEEE Standard on Piezoelectricity 1987 ANSI/ IEEE Standard 176-1987
  3. Gonzalez J L, Rubio A and Moll F 2001 A prospect of the piezoelectric effect to supply power to wearable electronic devices Proc. 4th Int. Conf. on Materials Engineering for Resources (Akita, Japan) pp 202-07
  4. Cavallier B, Nouira H, Foltete E, Hirsinger L and Ballandras S 2005 Energy storage capacity of vibrating structure: application to a shock system Proc. Symp. on Design, Test, Integration and Packaging of MEMS/ MOEMS DTIP05 (Montreux, Switzerland) pp 391-3
  5. Sodano H A, Magliula E A, Park G and Inman D J 2002 Electric power generation using piezoelectric materials Proc. 13th Int. Conf. on Adaptive Structures and Technologies (Potsdam, Germany) pp 153-61
  6. Duggirala R, Li H, Pappu A M, Fu Z, Aspel A and Lal A 2004 Radioisotope micropower generator for CMOS self-powered sensor microsystems Proc. 4th Int. Workshop on Micro and Nantechnology for Power Generation and Energy Conversion Applications PowerMEMS 2004 (Kyoto, Japan) pp 133-6
  7. Williams C W and Yates R B 1996 Analysis of a micro-electric generator for microsystems Sensors Actuators A 52 8-11 · DOI
  8. Huang W S, Tzeng K E, Cheng M C and Huang R S 2003 Design and fabrication of a vibrational micro-generator for wearable MEMS Proc. Eurosensors XVII (Guimaraes, Portugal) pp 695-7
  9. Pérez-Rodríguez A, Serre C, Fondevilla N, Cereceda C, Morante J R, Esteve J and Montserrat J 2005 Design of electromagnetic inertial generators for energy scavenging applications Proc. Eurosensors XIX (Barcelona, Spain) paper MC5
  10. Amirtharajah R and Chandrakasan A P 1998 Self-powered signal processing using vibration-based power generation IEEE J. Solid-State Circuits 33 687-95 · DOI
  11. Despesse G, Jager T, Chaillout J, Leger J, Vassilev A, Basrour S and Chalot B 2005 Fabrication and characterisation of high damping electrostatic micro devices for vibration energy scavenging Proc. Design, Test, Integration and Packaging of MEMS and MOEMS pp 386-90
  12. Roundy S 2003 Energy scavenging for wireless sensor nodes with a focus on vibration to electricity conversion PhD Thesis University of California, Berkeley

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Authors
Beeby, S. P., Tudor, M. J., & White, N. M.
Affiliations
University of Southampton (GB)
Venue
Measurement Science and Technology
Published
2006-10-26
Volume
17
Issue
12
Pages
R175-R195
ISSN
  • 0957-0233 (ISSN-L)
  • 1361-6501
OpenAlex
W2151603769
Cited by
3,008
References
101
Citations by year
2026: 75 · 2025: 74 · 2024: 108 · 2023: 104 · 2022: 137 · 2021: 141 · 2020: 133 · 2019: 187 · 2018: 225 · 2017: 220 · 2016: 232 · 2015: 222 · 2014: 241 · 2013: 233 · 2012: 190
FWCI
155.13
Type
journal article
Language
en
Open access
Locations
  • Measurement Science and Technology (publishedVersion)
  • ePrints Soton (University of Southampton) (acceptedVersion)
Funders
Engineering and Physical Sciences Research Council (EP/D042917/1)
Topics
  • Physical Sciences › Engineering › Mechanical Engineering › Innovative Energy Harvesting Technologies
  • Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
Keywords
vibration energy harvesting, self-powered microsystems, piezoelectric generators, electromagnetic generator, electrostatic generator, coupling coefficient

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