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Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology
Abstract
High-index-contrast, wavelength-scale structures are key to ultracompact integration of photonic integrated circuits. The fabrication of these nanophotonic structures in silicon-on-insulator using complementary metal-oxide-semiconductor processing techniques, including deep ultraviolet lithography, was studied. It is concluded that this technology is capable of commercially manufacturing nanophotonic integrated circuits. The possibilities of photonic wires and photonic-crystal waveguides for photonic integration are compared. It is shown that, with similar fabrication techniques, photonic wires perform at least an order of magnitude better than photonic-crystal waveguides with respect to propagation losses. Measurements indicate propagation losses as low as 0.24 dB/mm for photonic wires but 7.5 dB/mm for photonic-crystal waveguides.
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Cited by
Bogaerts, W., De Heyn, P., Van Vaerenbergh, T., De Vos, K., Kumar Selvaraja, S., Claes, T., Dumon, P., Bienstman, P., Van Thourhout, D., & Baets, R. (2012) · Laser & Photonics Reviews · doi:10.1002/lpor.201100017 · Cited by 2,643
Self-citationHe, M., Xu, M., Ren, Y., Jian, J., Ruan, Z., Xu, Y., Gao, S., Sun, S., Wen, X., Zhou, L., et al. (2019) · Nature Photonics · doi:10.1038/s41566-019-0378-6 · Cited by 1,204
Ultracompact optical buffers on a silicon chip
Xia, F., Sekaric, L., & Vlasov, Y. (2007) · Nature Photonics · doi:10.1038/nphoton.2006.42 · Cited by 1,123
Corcoran, B., Monat, C., Grillet, C., Moss, D. J., Eggleton, B. J., White, T. P., O'Faolain, L., & Krauss, T. F. (2009) · Nature Photonics · doi:10.1038/nphoton.2009.28 · Cited by 624
Rahim, A., Hermans, A., Wohlfeil, B., Petousi, D., Kuyken, B., Van Thourhout, D., & Baets, R. G. (2021) · Advanced Photonics · doi:10.1117/1.ap.3.2.024003 · Cited by 391
Metadata
- Venue
- Journal of Lightwave Technology
- Published
- 2005-01
- Volume
- 23
- Issue
- 1
- Pages
- 401-412
- ISSN
- 0733-8724 (ISSN-L)
- 1558-2213
- OpenAlex
- W2147340725
- Cited by
- 861
- References
- 0
- FWCI
- 67.37
- Type
- journal article
- Language
- en
- Open access
- closed
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- Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology. (2005). Journal of Lightwave Technology. https://doi.org/10.1109/jlt.2004.834471
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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